Advertisement

Microsystem Technologies

, Volume 18, Issue 7–8, pp 931–943 | Cite as

Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy

  • Ulrich MeschederEmail author
  • Antwi Nimo
  • Bernhard Müller
  • Awad Saad Abou Elkeir
Technical Paper

Abstract

The design and fabrication process of an integrated micro energy harvester capable of harvesting electrical energy from low amplitude mechanical vibrations is presented. A specific feature of the presented energy harvester design is its capability to harvest vibrational energy from different directions (3D). This is done through an innovative approach of electrets placed on vertical sidewalls, allowing miniaturization of 3D capacitive energy harvester fabrication on monolithic CMOS substrates. A new simple electret charging method using ionic hair-dryers is used. The charging performance of SiO2 and CYTOP electrets are characterized for electrets in horizontal arrangement and electrets deposited on vertical sidewalls.

Keywords

Surface Potential Energy Harvester Parallel Plate Capacitor Vertical Sidewall Seismic Mass 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

The work has been supported by the State Baden-Wuerttemberg within the research programme “Innovative Projekte”. Thanks also to Alexander Filbert and Khurram Ashraf for experimental support.

References

  1. Arakawa Y, Suzuki Y, Kasaki N (2004) Micro Seismic power generator using electrets polymer film. Power MEMS 2004, Kyoto, Japan, pp 187–190Google Scholar
  2. Basset P, Galayko D, Paracha AM, Marty F, Dudka A, Bourouina T (2009) A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. J Micromech Microeng 19(11):115025. doi: 10.1088/0960-1317/19/11/115025 CrossRefGoogle Scholar
  3. Boland J, Chao Y, Suzuki Y, Tai Y (2003) Micro Electret Power generator. IEEE 2003:538–541Google Scholar
  4. Edamoto M, Suzuki Y, Kasagi N, Kashiwagi K, Morizawa Y, Yokoyama T, Seki T, Oba M (2009) Low-resonant-frequency micro electret generator for energy harvesting application. Proceedings of the IEEE International Conference on MEMS, pp 1059–1062Google Scholar
  5. Honzumi M, Ueno A, Hagiwara K, Suzuki Y, Tajima T, Kasagi N (2010) Soft-X-ray-charged vertical electrets and its application to electrostatic transducers. Proceedings of MEMS 2010, Hongkong, pp 635–638Google Scholar
  6. Kiziroglou ME, He CR, Yeatman EM (2009) Rolling rod electrostatic microgenerator. IEEE Trans Ind Electron 56(4):1101–1108. doi: 10.1109/TIE.2008.2004381 CrossRefGoogle Scholar
  7. Mescheder U, Urbanovic P, Müller B, Baborie S (2009) Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems. J Micromech Microeng 19(9):094003. doi: 10.1088/0960-1317/19/9/094003 CrossRefGoogle Scholar
  8. Mitcheson PD, Green TC, Yeatman EM, Holmes AS (2004) Architectures for vibration-driven micropower generators. J Microelectromech Syst 13(3):429–440. doi: 10.1109/JMEMS.2004.830151 CrossRefGoogle Scholar
  9. Nguyen DS, Halvorsen E, Jensen GU, Vogl A (2010) Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs. J Micromech Microeng 20(12):125009. doi:10.1088/0960-1317/20/12/125009 CrossRefGoogle Scholar
  10. Nimo A, Mescheder U (2010) 3D capacitive vibrational harvester for autonomous lowpower sensors. Proc Power MEMS 2010. Poster paper, pp 49–52Google Scholar
  11. Saad A, Mescheder U, Müller B, Nimo A (2010) High-efficient, low-cost electret charging set-up for MEMS-based energy harvesting systems. Proc Power MEMS 2010. Poster paper, pp 61–64Google Scholar
  12. Scott Meninger, Oscar Mur-Miranda Jose, Rajeevan Amirtharajah, Chandrakasan Anantha P, Lang Jeffrey H (2001) Vibration-to-electric energy conversion. IEEE VLSI Syst 9(1):64–75CrossRefGoogle Scholar
  13. Tsutsumino T, Suzuki Y, Kasagi N, Sakane Y, and Suzuki Yuji (2006) Seismic power generator using high-performance polymer electret. Proceedings of the IEEE International Conference on MEMS, pp 98–101Google Scholar
  14. Williams CB, Yates RB (1996) Analysis of a micro-electric generator for microsystems. Sensors and Actuator A 52:8–11CrossRefGoogle Scholar
  15. Yamashita Kiyotaka, Honzumi Makoto, Hagiwara Kei, Iguchi Yoshinori, Suzuki Yuji (2010) Vibration-driven MEMS energy harvester with vertical electrets. Proc PowerMEMS 2010. Oral paper, pp 165–168Google Scholar
  16. Zhang J, Chen Z, Hao Y, Wen Z, Jin Y, Wen Zhiyu (2007) PECVD SiO2/Si3N4 double layers electrets for application in MEMS power generator. PowerMEMS 2007, Germany, Freiburg, pp 105–108Google Scholar

Copyright information

© Springer-Verlag 2012

Authors and Affiliations

  • Ulrich Mescheder
    • 1
    Email author
  • Antwi Nimo
    • 1
    • 2
  • Bernhard Müller
    • 1
  • Awad Saad Abou Elkeir
    • 1
  1. 1.Department Electrical and Computer Engineering/Institute for Applied ResearchFurtwangen UniversityFurtwangenGermany
  2. 2.IMTEK-Institut für MikrosystemtechnikFreiburgGermnay

Personalised recommendations