Microsystem Technologies

, Volume 18, Issue 7–8, pp 931–943 | Cite as

Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy

  • Ulrich MeschederEmail author
  • Antwi Nimo
  • Bernhard Müller
  • Awad Saad Abou Elkeir
Technical Paper


The design and fabrication process of an integrated micro energy harvester capable of harvesting electrical energy from low amplitude mechanical vibrations is presented. A specific feature of the presented energy harvester design is its capability to harvest vibrational energy from different directions (3D). This is done through an innovative approach of electrets placed on vertical sidewalls, allowing miniaturization of 3D capacitive energy harvester fabrication on monolithic CMOS substrates. A new simple electret charging method using ionic hair-dryers is used. The charging performance of SiO2 and CYTOP electrets are characterized for electrets in horizontal arrangement and electrets deposited on vertical sidewalls.


Surface Potential Energy Harvester Parallel Plate Capacitor Vertical Sidewall Seismic Mass 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The work has been supported by the State Baden-Wuerttemberg within the research programme “Innovative Projekte”. Thanks also to Alexander Filbert and Khurram Ashraf for experimental support.


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Copyright information

© Springer-Verlag 2012

Authors and Affiliations

  • Ulrich Mescheder
    • 1
    Email author
  • Antwi Nimo
    • 1
    • 2
  • Bernhard Müller
    • 1
  • Awad Saad Abou Elkeir
    • 1
  1. 1.Department Electrical and Computer Engineering/Institute for Applied ResearchFurtwangen UniversityFurtwangenGermany
  2. 2.IMTEK-Institut für MikrosystemtechnikFreiburgGermnay

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