Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
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The design and fabrication process of an integrated micro energy harvester capable of harvesting electrical energy from low amplitude mechanical vibrations is presented. A specific feature of the presented energy harvester design is its capability to harvest vibrational energy from different directions (3D). This is done through an innovative approach of electrets placed on vertical sidewalls, allowing miniaturization of 3D capacitive energy harvester fabrication on monolithic CMOS substrates. A new simple electret charging method using ionic hair-dryers is used. The charging performance of SiO2 and CYTOP electrets are characterized for electrets in horizontal arrangement and electrets deposited on vertical sidewalls.
KeywordsSurface Potential Energy Harvester Parallel Plate Capacitor Vertical Sidewall Seismic Mass
The work has been supported by the State Baden-Wuerttemberg within the research programme “Innovative Projekte”. Thanks also to Alexander Filbert and Khurram Ashraf for experimental support.
- Arakawa Y, Suzuki Y, Kasaki N (2004) Micro Seismic power generator using electrets polymer film. Power MEMS 2004, Kyoto, Japan, pp 187–190Google Scholar
- Boland J, Chao Y, Suzuki Y, Tai Y (2003) Micro Electret Power generator. IEEE 2003:538–541Google Scholar
- Edamoto M, Suzuki Y, Kasagi N, Kashiwagi K, Morizawa Y, Yokoyama T, Seki T, Oba M (2009) Low-resonant-frequency micro electret generator for energy harvesting application. Proceedings of the IEEE International Conference on MEMS, pp 1059–1062Google Scholar
- Honzumi M, Ueno A, Hagiwara K, Suzuki Y, Tajima T, Kasagi N (2010) Soft-X-ray-charged vertical electrets and its application to electrostatic transducers. Proceedings of MEMS 2010, Hongkong, pp 635–638Google Scholar
- Nimo A, Mescheder U (2010) 3D capacitive vibrational harvester for autonomous lowpower sensors. Proc Power MEMS 2010. Poster paper, pp 49–52Google Scholar
- Saad A, Mescheder U, Müller B, Nimo A (2010) High-efficient, low-cost electret charging set-up for MEMS-based energy harvesting systems. Proc Power MEMS 2010. Poster paper, pp 61–64Google Scholar
- Tsutsumino T, Suzuki Y, Kasagi N, Sakane Y, and Suzuki Yuji (2006) Seismic power generator using high-performance polymer electret. Proceedings of the IEEE International Conference on MEMS, pp 98–101Google Scholar
- Yamashita Kiyotaka, Honzumi Makoto, Hagiwara Kei, Iguchi Yoshinori, Suzuki Yuji (2010) Vibration-driven MEMS energy harvester with vertical electrets. Proc PowerMEMS 2010. Oral paper, pp 165–168Google Scholar
- Zhang J, Chen Z, Hao Y, Wen Z, Jin Y, Wen Zhiyu (2007) PECVD SiO2/Si3N4 double layers electrets for application in MEMS power generator. PowerMEMS 2007, Germany, Freiburg, pp 105–108Google Scholar