Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives
- 294 Downloads
A scanning micromirror suspended by a pair of V-shaped beams with vertical electrostatic comb drives was designed, modeled, fabricated and characterized. The dynamic analyses were carried out by both theory calculation and FEM simulation to obtain frequency response, stiffness characteristics, oscillation modes and their resonance frequencies. The device was fabricated using the silicon-on-insulator process by only two photolithography masks. Some problems during the process such as the micromirror distortion and the side sticking of the comb fingers were effectively solved by thermal annealing and alcohol-replacement methods, respectively. Based on the fabricated device, the typical scanning patterns for 1-D and 2-D operation were obtained. The experimental results reveal that the micromirror can work in resonant mode with the resonant frequency of 2.38 kHz. The maximum deflection angles can reach ±4.8°, corresponding to a total optical scanning range of 19.2° at a driving voltage of 21 V.
- Davis WO, Sprague R, Miller J (2008) MEMS-based pico projector display. Proceedings of IEEE/LEOS international conference on optical MEMs and nanophotonics. doi:10.1109/OMEMS.2008.4607813
- Lin WT, Chiou JC, Tsou C (2005) A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications. Microsyst Technol 11:204–209Google Scholar
- Schenk H, Peter Dürr, Detlef Kunze, Heinz Kück (1999) A new driving principle for micromechanical torsional actuators. MEMS 1:333–338Google Scholar
- Schenk H, Wolter A, Lakner H (2001) Design optimization of an electrostatically driven micro scanning mirror. MOEMS Miniatur Syst II Proc SPIE 4561:35–44Google Scholar