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Microsystem Technologies

, 17:313 | Cite as

Characterisation of high aspect ratio non-conductive ceramic microstructures made by spark erosion

  • T. HöselEmail author
  • P. Cvancara
  • T. Ganz
  • C. Müller
  • H. Reinecke
Technical Paper

Abstract

The spark erosion process is widely used for micro structuring. Its possibility to structure materials independent of their material properties like high hardness or melting temperature enables to address a large material diversity. However the process requires a minimal electrical conductivity of 0.1 Scm−1. Nevertheless recent research has shown that the usage of an assisting electrode makes a processing of non-conductive materials possible. Thus even ceramics like Al2O3 or ZrO2 can be processed. These materials are becoming more and more interesting for industrial application and the field of miniaturisation due to their outstanding material characteristics like high hardness, bending strength, melting temperature and chemical inertness. In this study a new lacquer based assisting electrode is used to erode bars in zirconia samples. For this purpose a modular tool concept is established. Bars with aspect ratios of more than 80 are generated. The achieved bar heights are 1.5 mm and the smallest bar width is 8 μm. Furthermore a characterisation of the sidewall angles showed mean values between 0.4° and 2.2° depending on the bar height and width.

Keywords

Tool Wear Titanium Nitride Tool Electrode Tool Wear Rate Zirconia Sample 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • T. Hösel
    • 1
    Email author
  • P. Cvancara
    • 1
  • T. Ganz
    • 1
  • C. Müller
    • 1
  • H. Reinecke
    • 1
  1. 1.Laboratory for Process Technology, Department of Microsystems Engineering, IMTEKUniversity of FreiburgFreiburgGermany

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