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Microsystem Technologies

, Volume 17, Issue 4, pp 645–654 | Cite as

Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations

  • Céline CasenaveEmail author
  • Gérard Montseny
  • Henri Camon
  • François Blard
Technical Paper
  • 88 Downloads

Abstract

We present a general method for dynamic correction of biases induced by temperature variations. This method is simple to implement and useful when very high precision is required: it indeed allows significant improvements compared to standard static corrections. It is mainly based on a universal dynamic model allowing to describe macroscopic effects of complex underlying thermal phenomena inside the device. Some experimental results related to a MEMS with high precision pull-in voltage are presented in order to highlight the efficiency of the approach.

Keywords

Static Correction Voltage Reference Thermal Transfer Dynamic Correction Numerical Cost 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • Céline Casenave
    • 1
    • 2
    Email author
  • Gérard Montseny
    • 1
    • 2
  • Henri Camon
    • 1
    • 2
  • François Blard
    • 1
    • 2
  1. 1.CNRS, LAASToulouseFrance
  2. 2.UPS, INSA, INP, ISAE, LAAS, Université de ToulouseToulouseFrance

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