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Microsystem Technologies

, Volume 17, Issue 4, pp 513–522 | Cite as

A new design for rotational, tunable wideband RF MEMS capacitors

  • Julien PagazaniEmail author
  • Pierre Nicole
  • Lionel Rousseau
  • Frédéric Marty
  • Gaëlle Lissorgues
Technical Paper

Abstract

Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.

Keywords

Radio Frequency Voltage Control Oscillator Actuation Voltage DRIE Step Rotational Displacement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • Julien Pagazani
    • 1
    • 2
    Email author
  • Pierre Nicole
    • 1
  • Lionel Rousseau
    • 2
  • Frédéric Marty
    • 2
  • Gaëlle Lissorgues
    • 2
  1. 1.THALES Airborne SystemsElancourtFrance
  2. 2.Université Paris-Est, ESYCOM, ESIEE Paris, Engineering SchoolNoisy le GrandFrance

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