Microsystem Technologies

, Volume 17, Issue 4, pp 513–522 | Cite as

A new design for rotational, tunable wideband RF MEMS capacitors

  • Julien PagazaniEmail author
  • Pierre Nicole
  • Lionel Rousseau
  • Frédéric Marty
  • Gaëlle Lissorgues
Technical Paper


Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.


Radio Frequency Voltage Control Oscillator Actuation Voltage DRIE Step Rotational Displacement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. Barriere F, Crunteanu A, Pothier A, Chatras M, Blondy P (2010) A low value normally on RF-MEMS switched capacitor for high Q millimeter wave tuning, SiRF Google Scholar
  2. Bazin G, Gilles JP, Crozat P, Megherbi Souhil RF (2000) MEMS: Silicon micro-mechanical capacitive structures, European Microwave Week/GAASGoogle Scholar
  3. Bronson J, Fassi I (2008) Parametric design of an electrostatic rotary microactuator using finite element analysis and metamodeling. EuroSimeE, FreiburgGoogle Scholar
  4. Chaudhuri AR, Chakraborty S, Bhattacharya A, Chaudhuri RR, Bhattacharyya TK (2009) System level realization and analysis of MEMS integrated voltage controlled oscillator. Applied Electromagnetics Conference (AEMC)Google Scholar
  5. Fouladi S, Bakri-Kassem M, Mansour RR (2007) An integrated tunable band-pass filter using MEMS parallel-plate variable capacitors implemented with 0.35 μm CMOS Technology. Microwave Symposium, IEEE/MTT-S InternationalGoogle Scholar
  6. Fritschi R (2007) Above-IC RF MEMS devices for communication applications, PhD N°3778, EPFLGoogle Scholar
  7. Gu L, Wu Z, Li X (2009) An wide-range tunable on-chip radio-frequency LC-tank formed with a post-CMOS-compatible MEMS fabrication technique. Microelectron J 40:131–136Google Scholar
  8. Li Z, Hao Y, Zhang D, Li T, Wu G (2002) An SOI–MEMS technology using substrate layer and bonded glass as wafer-level package. Sensors Actuators A96:34–42Google Scholar
  9. McFeetors G, Okoniewski M (2006) Custom fabricated high-Q analog dual-gap RF MEMS varactors, microwaves, radar and wireless communications. MIKON 2006Google Scholar
  10. Nguyen C (2004) Vibrating RF MEMS for next generation wireless applications (Best Invited Paper Award). In: Proceedings of IEEE 2004 custom integrated circuits conference, IEEE Press, Piscataway, pp 257–264Google Scholar
  11. Nguyen HD, Hah D, Patterson PR, Chao R, Piyawattanametha W, Lau EK, Wu MC (2004) Angular vertical comb-driven tunable capacitor with high-tuning capabilities. J Microelectromech Syst 13:406–413Google Scholar
  12. Painter CC, Shkel MA (2001) Structural and thermal analysis of a MEMS angular gyroscope. In: Varadan VK (ed) Proc SPIE, Smart structures and materials: smart electronics and MEMS. vol 4334, p 86–94Google Scholar
  13. Rijks TGSM, van Beek JTM, Steeneken PG, Ulenaers MJE, De Coster J, Puers R (2004) RF MEMS tunable capacitors with large tuning ratio, 17th MEMS Eindhoven, NetherlandsGoogle Scholar
  14. Rosas G, Murphy R, Moreno W (2010) Smart antenna using MTM-MEMS, wireless and microwave technology conference (WAMICON), IEEE 11th Annual, pp 1–5Google Scholar
  15. Tiggelman MPJ, Reimann K, Van Rijs F, Schmitz J, Hueting RJE (2009) On the trade-off between quality factor and tuning ratio in tunable high-frequency capacitors. IEEE Trans Electron Devices 56(9):2128–2136. ISSN0018-9383Google Scholar
  16. Wang L, Mukherjee T (2010) A 3.4 GHz to 4.3 GHz frequency-reconfigurable class e power amplifier with an integrated CMOS-MEMS LC Balun, IEEE Radio Frequency Integrated Circuits Symposium, pp 167–170Google Scholar
  17. Young DJ, Boser BE (1996) A micromachined variable capacitor for monolithic low-noise VCOS, Technical Digest. IEEE solid-state sensor and actuator workshop, Hilton Head Island, SC, pp 86–89Google Scholar
  18. Zou J, Liu C, Schutt-Aine J, Chen J, Kang S-M (2000) Development of a wide tuning range MEMS tunable capacitor for wireless communication systems, electron devices meeting. IEDM Technical DigestGoogle Scholar

Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • Julien Pagazani
    • 1
    • 2
    Email author
  • Pierre Nicole
    • 1
  • Lionel Rousseau
    • 2
  • Frédéric Marty
    • 2
  • Gaëlle Lissorgues
    • 2
  1. 1.THALES Airborne SystemsElancourtFrance
  2. 2.Université Paris-Est, ESYCOM, ESIEE Paris, Engineering SchoolNoisy le GrandFrance

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