Microsystem Technologies

, Volume 17, Issue 1, pp 165–173

Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes

  • Emanuele Bertarelli
  • Alberto Corigliano
  • Andreas Greiner
  • Jan G. Korvink
Technical Paper

DOI: 10.1007/s00542-010-1185-7

Cite this article as:
Bertarelli, E., Corigliano, A., Greiner, A. et al. Microsyst Technol (2011) 17: 165. doi:10.1007/s00542-010-1185-7

Abstract

A novel design strategy to avoid pull-in occurrence in electrostatic micro electro mechanical systems is proposed. It combines charge control with ring electrodes, on a circular geometry. This idea is introduced here for the design of efficient and reliable high stroke electrostatic diaphragm micropumps, while it has a broad potential applicability. A minimal lumped one degree-of-freedom model is derived and used to introduce and demonstrate the proposed approach for a circular plate geometry. Finite element models are subsequently adopted for a more detailed device modelling. As expected, charge control exhibits a stabilizing effect with respect to voltage drive, but not sufficient to achieve a full-range stability for the considered geometry. When the electrode area is properly defined, stability range can be extended up to gap closure in the central part of the membrane. In this configuration, the increase in voltage required for full-range device drive would be relevant, while in charge control the penalty is considerably lower. Finally, loading conditions and geometrical parameters for an optimized actuation are suggested.

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Emanuele Bertarelli
    • 1
    • 2
  • Alberto Corigliano
    • 1
  • Andreas Greiner
    • 2
  • Jan G. Korvink
    • 2
    • 3
  1. 1.Department of Structural EngineeringPolitecnico di MilanoMilanItaly
  2. 2.Laboratory for Simulation, Department of Microsystems EngineeringUniversity of FreiburgFreiburgGermany
  3. 3.School of Soft Matter Research, Freiburg Institute of Advanced StudiesUniversity of FreiburgFreiburgGermany

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