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Microsystem Technologies

, Volume 17, Issue 4, pp 543–552 | Cite as

Design, modeling and characterization of stable, high Q-factor curved Fabry–Pérot cavities

  • Maurine MalakEmail author
  • Nicolas Pavy
  • Frédéric Marty
  • Elodie Richalot
  • Ai-Qun Liu
  • Tarik Bourouina
Technical Paper

Abstract

In this paper, we introduce a novel design for high performance silicon-based Fabry–Pérot cavities and their corresponding design model. According to the design model, the new design shows higher stability, lower insertion loss and higher quality factor Q. Our methodology was based, on one hand, on taking advantage of light reflection and refraction over curved surfaces with curvatures along 2 orthogonal directions, in order to confine the Gaussian beam inside the cavity, thus reducing loss due to beam divergence. Such design enables approaching new limits, where Q-factor is mainly governed by the mirrors reflectance. On the other hand, the use of Bragg reflectors, obtained by DRIE etching enables reaching reflectances above 99%, thus enabling very high Q-factors.

Keywords

Transfer Matrix Gaussian Beam Resonance Wavelength Optical Resonator Curve Mirror 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Maurine Malak
    • 1
    Email author
  • Nicolas Pavy
    • 1
  • Frédéric Marty
    • 1
  • Elodie Richalot
    • 1
  • Ai-Qun Liu
    • 2
  • Tarik Bourouina
    • 1
  1. 1.ESYCOM Lab., ESIEE-Paris and UPEMLVUniversité Paris-EstNoisy-Le-Grand CedexFrance
  2. 2.School of Electrical and Electronic EngineeringNanyang Technological University (NTU)SingaporeSingapore

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