Thickness measurement in ultrathick multilayer microstructures
Technical Paper
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Abstract
Microparts are more and more mass products and quality assurance becomes an important factor in manufacturing. Based on a new optical principle, a tool was developed and tested which is well suited for easy non-destructive measurements at microstructures as well as for measurement at transparent layers. Thickness measurement of ca. 1 mm ultrathick photoresist layers on non-patterned high-reflective gold surface was demonstrated. As well, measurement of multi layer systems consisting of each several hundred micrometers thick transparent layers was verified at capped microfluidic channel structures.
Keywords
Gold Surface Microfluidic Chip Microfluidic Channel Cover Sheet Transparent Layer
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© Springer-Verlag 2010