Microsystem Technologies

, Volume 16, Issue 7, pp 1073–1079 | Cite as

Modeling of an electrostatic torsional micromirror for laser projection system

  • Eleonora Marchetti
  • Emilio Volpi
  • Francesco Battini
  • Luca Bacciarelli
  • Luca Fanucci
  • Ulrich Hofmann
Technical Paper

Abstract

This paper presents the Simulink model of a new 2D torsional scanning micromirror. This micro-opto-electro-mechanical-system (MOEMS) is very important towards the integration into a system on a package of a complete laser projection system. Modeling and simulation of the MOEMS is a key point for the development of the proper micromirror electronic conditioning interface thus reducing time to market and production costs. In literature, there are not exhaustive examples of complete characterizations of 2D torsional scanning micromirrors. The aim of this work is to develop a Simulink model which incorporates the main mechanical and electrostatic parameters of the sensor such as the resonance frequency, the torsional constant and capacitance versus rotation angle characteristic. This model has been successfully verified via experimental measurements and it proved his effectiveness in the development of the relevant electronic conditioning circuitry.

References

  1. Bacciarelli L (2009) Platform-based design for next generation system on chip for sensor interfacing and conditioning. Ph. D. dissertation, University of PisaGoogle Scholar
  2. Battini F, Volpi E, Marchetti E, Cecchini T, Sechi F, Fanucci L (2009) A fast developing and low cost characterization and test environment for a double axis resonating micromirror. Proc of IWASI 2009, Trani (BA), Italy, pp 25–26Google Scholar
  3. Conant RA, Nee JT, Lau KY, Muller RS (2000) A flat high-frequency scanning micromirror. Berkeley Sensor & Actuator Center, University of CaliforniaGoogle Scholar
  4. Hofmann U, Oldsen M, Quenzer H, Jane J, Heller M, Weiss M, Fakas G, Ratzmann L, Marchetti E, D’Ascoli F, Melani M, Bacciarelli L, Volpi E, Mostardini L, Sechi F, De Marinis M, Wagner B (2008) Wafer-level vacuum packaged micro-scanning mirrors for compact laser projection displays. Proc of SPIE 2008, Vol 68–87, pp 110–114Google Scholar
  5. Petersen KE, Noble B, Sneddon IN (1980) Silicon Torsional Scanning Mirror. IBM J Res Dev 24(5):631–637CrossRefGoogle Scholar
  6. Selvakumar A, Najafi K, Juan WH, Pang S (2003) Vertical Comb Array Microactuators. IEEE J Microelectromech Syst 12(4):440–449CrossRefGoogle Scholar
  7. Sprague R, Montague T, Brown D (2005) Bi-axial magnetic drive for scanned beam display mirrors. Proc of MOEMS Display and Imagining Systems III, Proc of SPIE 5721:1–13Google Scholar
  8. Yang EH, Hishinuma Y, Cheng JG, McKinstry ST, Bloemhof E, Martin LB (2006) Thin-Film Piezoelectric Unimorph Actuator-Based Deformable Mirror with a Transferred Silicon Membrane. IEEE J Microelectromech Syst 15:1214–1225CrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Eleonora Marchetti
    • 1
  • Emilio Volpi
    • 1
  • Francesco Battini
    • 1
  • Luca Bacciarelli
    • 1
  • Luca Fanucci
    • 1
  • Ulrich Hofmann
    • 2
  1. 1.Department of Information EngineeringUniversity of PisaPisaItaly
  2. 2.Fraunhofer Institute for Silicon Technology ISITItzehoeGermany

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