Microsystem Technologies

, Volume 16, Issue 8–9, pp 1609–1617

Easily manageable, electrothermally actuated silicon micro gripper

Technical Paper


This paper presents a new batch process to fabricate thermally driven silicon micro grippers for handling and manipulation objects smaller than 25 μm. To achieve a robust gripper gearing with fine gripping tips, silicon on insulator (SOI) technology is used. The flexure gearing is driven by two integrated thermal expansion actuators that are moving in opposite directions and are actuated by Joule heating. In addition, a customized gripper mounting mechanism is presented, which offers fast and easy gripper handling, resulting in reduced tooling time and lower costs for the user. Finally, the experimental results and electrical characteristics for the sophisticated gripper design are presented.


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Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  1. 1.Institute for MicrotechnologyTechnische Universität BraunschweigBrunswickGermany

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