Microsystem Technologies

, Volume 16, Issue 8–9, pp 1385–1392 | Cite as

Development of separated micromold system for an efficient replication of high aspect ratio microstructures

Technical Paper


In the present study, a separated micromold system (SMS) is newly proposed and developed for an efficient replication of high aspect ratio microstructures. The present SMS basically consists of micromold modules, each having a split structure of the complete microstructure to be replicated. So fabricated micromold modules are assembled for a replication of the microstructures and subsequently separated in a demolding stage. In this manner, serious problems commonly encountered in a conventional fabrication process for high aspect ratio structures can be effectively overcome. For a precise fabrication of the micromold modules, a deep X-ray lithography and nickel electroforming processes were carried out, resulting in nickel SMS including various half circular microstructures. By utilizing the obtained SMS modules, high aspect ratio micro-scale cilium structure and its array were successfully replicated by a hot embossing process.


PMMA High Aspect Ratio Mold Insert PMMA Sheet Electroforming Process 



This work was supported by Defense Acquisition Program Administration and Agency for Defense Development under the contract (UD090024FD). This research was also supported by Basic Science Research Program (2009-0092817) and WCU Program (R31-2008-000-10105-0) through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology. And experiments at PLS were supported in part by Ministry of Education, Science and Technology and POSTECH.


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Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringPohang University of Science and Technology (POSTECH)PohangKorea
  2. 2.Department of Integrative Biosciences and BiotechnologyPohang University of Science and Technology (POSTECH)PohangKorea

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