Microsystem Technologies

, Volume 16, Issue 8–9, pp 1385–1392 | Cite as

Development of separated micromold system for an efficient replication of high aspect ratio microstructures

Technical Paper

Abstract

In the present study, a separated micromold system (SMS) is newly proposed and developed for an efficient replication of high aspect ratio microstructures. The present SMS basically consists of micromold modules, each having a split structure of the complete microstructure to be replicated. So fabricated micromold modules are assembled for a replication of the microstructures and subsequently separated in a demolding stage. In this manner, serious problems commonly encountered in a conventional fabrication process for high aspect ratio structures can be effectively overcome. For a precise fabrication of the micromold modules, a deep X-ray lithography and nickel electroforming processes were carried out, resulting in nickel SMS including various half circular microstructures. By utilizing the obtained SMS modules, high aspect ratio micro-scale cilium structure and its array were successfully replicated by a hot embossing process.

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Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringPohang University of Science and Technology (POSTECH)PohangKorea
  2. 2.Department of Integrative Biosciences and BiotechnologyPohang University of Science and Technology (POSTECH)PohangKorea

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