Microsystem Technologies

, Volume 16, Issue 7, pp 1051–1055 | Cite as

3D System-on-Chip technologies for More than Moore systems

  • Peter Ramm
  • Armin Klumpp
  • Josef WeberEmail author
  • Maaike M. V. Taklo
Technical Paper


3D integration is a key solution to the predicted performance problems of future ICs as well as it offers extreme miniaturization and cost-effective fabrication of More than Moore products. Through silicon via (TSV) technologies enable high interconnect performance compared to 3D packaging. At present TSVs are associated with a relatively high fabrication cost, but research world wide strive to bring the cost down to an acceptable level. An example of a 3D System-on-Chip (3D-SOC) technology is to introduce a post backend-of-line TSV process as an optimized technology for heterogeneous system integration. The introduced ICV-SLID process, that combines both TSVs and bonding, enables 3D integration of fabricated devices. Reliability issues related to thermo-mechanical stress caused by the TSV formation and the bonding are considered. 3D-SOC technology choices made to realize a heterogeneous ultra-small IC stack for a wireless tire pressure monitoring system (TPMS) as an automotive application are described.


Sensor Node Wireless Sensor Network Moore System CMOS Image Sensor Tire Pressure Monitoring System 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This report is partly based on a project supported by the European Commission under support-no. IST-026461. The authors would like to thank the colleagues of the e-CUBES project, especially Thomas Herndl, Josef Prainsack and Werner Weber/Infineon, Nicolas Lietaer/SINTEF/Gjermund Kittilsland/Sensonor, Peter Schneider and Sven Reitz/Fraunhofer IIS, Eberhard Kaulfersch, Robert Wieland, Reinhard Merkel, Lars Nebrich and Matthias Klein/Fraunhofer IZM.


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Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Peter Ramm
    • 1
  • Armin Klumpp
    • 1
  • Josef Weber
    • 1
    Email author
  • Maaike M. V. Taklo
    • 2
  1. 1.Munich DivisionFraunhofer Institute for Reliability and MicrointegrationMunichGermany
  2. 2.Department for Microsystems and NanotechnologySINTEFOsloNorway

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