Microsystem Technologies

, Volume 15, Issue 8, pp 1327–1333 | Cite as

Sub-μm structured lotus surfaces manufacturing

  • Matthias Worgull
  • M. Heckele
  • T. Mappes
  • B. Matthis
  • G. Tosello
  • T. Metz
  • J. Gavillet
  • P. Koltay
  • H. N. Hansen
Technical Paper

Abstract

Sub-μm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-μm structures with minimum lateral feature size of 400 nm and up to 4 μm high.

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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • Matthias Worgull
    • 1
  • M. Heckele
    • 1
  • T. Mappes
    • 2
  • B. Matthis
    • 1
  • G. Tosello
    • 3
  • T. Metz
    • 4
  • J. Gavillet
    • 5
  • P. Koltay
    • 4
  • H. N. Hansen
    • 3
  1. 1.Institute for Microstructure Technology (IMT)Forschungszentrum Karlsruhe (FZK)Eggenstein-LeopoldshafenGermany
  2. 2.Institute for Microstructure Technology (IMT)University of Karlsruhe (TH)Eggenstein-LeopoldshafenGermany
  3. 3.Department of Mechanical Engineering (MEK)Technical University of Denmark (DTU)Kgs LyngbyDenmark
  4. 4.Department of Microsystems Engineering (IMTEK)University of FreiburgFreiburgGermany
  5. 5.French Atomic Energy Commission (CEA)Laboratory of Innovation for New Energy Technologies and Nanomaterials (LITEN)GrenobleFrance

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