Sub-μm structured lotus surfaces manufacturing
- 174 Downloads
Sub-μm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-μm structures with minimum lateral feature size of 400 nm and up to 4 μm high.
KeywordsContact Angle PMMA Superhydrophobic Surface Honeycomb Structure Contact Angle Hysteresis
The presented research was performed within the framework of the European Network of Excellence “Multi Material Micro Manufacture: Technology and Applications” (4 M) (European Community founding FP6-500274-1; http://www.4m-net.org) and within the activity of the Cross Divisional Project “MINAFLOT” (Micro- and Nano-structured Surfaces for Liquid and Gas Management in Microstructured Flowfields) supported by 4 M and the European Community (Project no. FP6-500274-2). Furthermore the collaboration of the Polymer Technology Division (4 M Work package 4) and of the Microfluidics Application Division (4 M Work package 10) is gratefully acknowledged.
- Worgull M, Hetu J-F, Kabanemi KK, Heckele M (2006) Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication. J Microlith Microfab Microsyst 5(1)Google Scholar