Stiction issues and actuation of RF LIGA-MEMS variable capacitors
- 157 Downloads
High aspect ratio variable capacitors have been fabricated using deep X-ray lithography and electroplating. Stiction phenomena applicable to high aspect ratio devices are presented, including the conditions for stiction to occur and the critical dimensions of structures. Actuation tests at 3 GHz are also presented and show a maximum capacitance of 0.86 pF with no actuation voltage and a minimum capacitance of 0.70 pF with an actuation voltage of 20 V just before pull-in, which gives a tuning range of 1.23:1. Corresponding Q-factor values are 49.3 and 70.8 respectively. After pull-in, the measured capacitance is 0.61 pF, corresponding to a tuning range of 1.41:1, with a maximum Q-factor of 102.9.
KeywordsContact Angle PMMA High Aspect Ratio Tuning Range Actuation Voltage
This work was supported by the National Sciences and Engineering Research Council of Canada and by the Canadian Space Agency.
- Adamson AW, Gast AP (1997) Physical chemistry of surfaces, 6th edn. Wiley, New YorkGoogle Scholar
- Becker EW, Ehrfeld W, Hagmann P, Maner A, Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectr Eng 4(1):36–56Google Scholar
- Israelachvili JN (1985) Intermolecular and surface forces. Academic Press, New YorkGoogle Scholar
- Mastrangelo CH (2000) Suppression of stiction in MEMS. Mat Res Soc Symp Proc 605:105–116Google Scholar
- Rebeiz GM (2003) RF MEMS theory, design, and technology. Wiley, HobokenGoogle Scholar