Stiction issues and actuation of RF LIGA-MEMS variable capacitors
- 138 Downloads
High aspect ratio variable capacitors have been fabricated using deep X-ray lithography and electroplating. Stiction phenomena applicable to high aspect ratio devices are presented, including the conditions for stiction to occur and the critical dimensions of structures. Actuation tests at 3 GHz are also presented and show a maximum capacitance of 0.86 pF with no actuation voltage and a minimum capacitance of 0.70 pF with an actuation voltage of 20 V just before pull-in, which gives a tuning range of 1.23:1. Corresponding Q-factor values are 49.3 and 70.8 respectively. After pull-in, the measured capacitance is 0.61 pF, corresponding to a tuning range of 1.41:1, with a maximum Q-factor of 102.9.
- Adamson AW, Gast AP (1997) Physical chemistry of surfaces, 6th edn. Wiley, New YorkGoogle Scholar
- Becker EW, Ehrfeld W, Hagmann P, Maner A, Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectr Eng 4(1):36–56Google Scholar
- Israelachvili JN (1985) Intermolecular and surface forces. Academic Press, New YorkGoogle Scholar
- Mastrangelo CH (2000) Suppression of stiction in MEMS. Mat Res Soc Symp Proc 605:105–116Google Scholar
- Rebeiz GM (2003) RF MEMS theory, design, and technology. Wiley, HobokenGoogle Scholar