Replication technologies for HARM devices: status and perspectives
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Replication processes offer a number of considerable advantages for the production of micro components. This is not limited to the high economic efficiency achieved by numerous multiplications of master structures. Furthermore, micro devices can be produced of nearly every kind of material by one or a sequence of replication steps. In this contribution, five important processes of micro replication will be described, reflecting the wide variety from rapid prototyping over small and medium series to mass production. For future development, three main trends can be observed: the steady further miniaturization of shaping capability, the efforts to increase economic efficiency mainly by reducing cycle times and enlarging work areas, and the different approaches to combine shaping and joining procedures thus obtaining a minimum of process steps.
KeywordsHigh Aspect Ratio Rapid Prototype Injection Moulding Replication Process Mould Insert
The authors would like to thank their colleagues for their friendly and always helpful cooperation. Additionally, the authors thank for the financial support by the European Commission within the 4 M-Network of Excellence, the BMBF and the Deutsche Forschungsgemeinschaft DFG (SFB 499).
- Bauer W, Knitter R, Müller M, Ritzhaupt-Kleissl H-J (2006) Cfi/Ber. DKG 83 13:65–69Google Scholar
- Chou SY, Krauss P, Renstrom P (1995) Imprint of sub-25 nm vias and trenches in polymers. Appl Phys Lett67 (21)Google Scholar
- Chou S, Krauss P, Zhang W, Guo L, Zhuang L (1997) Sub-10 nm imprint lithography and applications. J Vacuum Sci Technol 15, November/December, Nr. 6Google Scholar
- Fairley P (2003) 10 Emerging technologies that will change the World. Technology review, FebruaryGoogle Scholar
- Hanemann T, Honnef K, Haußelt J (2007) Process chain development for the rapid prototyping of microstructured polymer, ceramic and metal parts: composite flow behaviour optimization, replication via reaction molding and thermal postprocessing. Intern J of Adv Manuf Techn 33:167–175CrossRefGoogle Scholar
- Hershey R, Miller M, Jones C, Ganapathi M, Lu X, Doyle G, Lentz D, LaBrake D (2006) PhotonicCrystal patterning for high volume LED manufacturing. proceedings of SPIE, sixth international conference on solid state lighting 6337, SeptemberGoogle Scholar
- Mehne C, Heckele M, Steger R, Warkentin D (2006) Hot embossing of large area microfluidic devices with through holes. In: 6th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN), Baden, A, May 28–June 1Google Scholar
- Pfleging W, Hanemann T, Torge M, Bernauer W (2003) Rapid fabrication and replication of metal, ceramic, and plastic mould inserts for application in microsystem technologies. J Mech Eng Sci Proc Instn Mech Engrs 217(Part C):53–63Google Scholar
- Piotter V, Finnah G, Zeep B, Ruprecht R, Hausselt J (2007) Metal and ceramic micro components made by powder injection molding; materials science forum. Trans Tech Pub 534–536:373–376Google Scholar