Microsystem Technologies

, Volume 14, Issue 9–11, pp 1599–1605 | Cite as

Replication technologies for HARM devices: status and perspectives

  • V. PiotterEmail author
  • W. Bauer
  • T. Hanemann
  • M. Heckele
  • C. Müller
Technical Paper


Replication processes offer a number of considerable advantages for the production of micro components. This is not limited to the high economic efficiency achieved by numerous multiplications of master structures. Furthermore, micro devices can be produced of nearly every kind of material by one or a sequence of replication steps. In this contribution, five important processes of micro replication will be described, reflecting the wide variety from rapid prototyping over small and medium series to mass production. For future development, three main trends can be observed: the steady further miniaturization of shaping capability, the efforts to increase economic efficiency mainly by reducing cycle times and enlarging work areas, and the different approaches to combine shaping and joining procedures thus obtaining a minimum of process steps.


High Aspect Ratio Rapid Prototype Injection Moulding Replication Process Mould Insert 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors would like to thank their colleagues for their friendly and always helpful cooperation. Additionally, the authors thank for the financial support by the European Commission within the 4 M-Network of Excellence, the BMBF and the Deutsche Forschungsgemeinschaft DFG (SFB 499).


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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • V. Piotter
    • 1
    Email author
  • W. Bauer
    • 1
  • T. Hanemann
    • 1
    • 3
  • M. Heckele
    • 2
  • C. Müller
    • 3
  1. 1.Karlsruhe Research CentreInstitute for Materials Research IIIKarlsruheGermany
  2. 2.Institute for Micro Structure TechnologyKarlsruheGermany
  3. 3.Freiburg University, IMTEKFreiburgGermany

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