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Microsystem Technologies

, Volume 14, Issue 4–5, pp 683–690 | Cite as

Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling

  • C. BruchmannEmail author
  • B. Höfer
  • P. Schreiber
  • R. Eberhardt
  • W. Buss
  • T. Peschel
  • S. Gebhardt
  • A. Tünnermann
  • E. Beckert
Technical Paper
  • 85 Downloads

Abstract

PZT thick-films are printed on an Al2O3-substrate, generating a cantilever monomorph. A task of positioning with two degrees of freedom is successfully fulfilled. It is realized by two parallel arranged cantilevers that are mechanically combined with a bar that has solid hinges. Different combinations of hinges are simulated and practically tested. In the presented work, a lens is successfully positioned in front of a laser diode. The loss of the coupling efficiency due to the shrinking of the adhesive joint can be scaled down. The paper presents the theoretical work including the report on analytic and FEM simulation of both deflection and stress. The practical validation is also presented. A simple sensor system is used to find an optimized position of the lens in front of the diode. This position is automatically held over a long period of time. With the fabrication of the actuator using thick-film printing and laser cutting a low cost device is built.

Keywords

Test Pattern Piezoelectric Layer Fiber Coupling Piezoelectric Film Twist Mode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. Gebhardt S, Seffner L, Schlenkrich F, Schönecker A (2006) PZT thick films for microsystems applications. In: EMPS 2006 Proceedings: May 21–24, 2006, Terme Catez, Slovenia. Terme Catez, pp 9–13Google Scholar
  2. Pfeifer G (1982) Piezoelektrische Lineare Stellantriebe. Wissenschaftliche Schriftenreihe TH Karl-Marx-StadtGoogle Scholar
  3. Schreiber P, Hoefer B, Dannberg P, Zeitner UD (2005) High-brightness fiber-coupling schemes for diode laser bars. Proc SPIE 5876:1–10Google Scholar
  4. Smits J, Choi W (1991) The Constituent Equations of Piezoelectric Heterogeneous Bimorphs. In: IEEE Transactions On Ultrasonic’s, Ferroelectrics, And Frequency Control. Vol. 38. NO. 3Google Scholar
  5. Zarnik M, Belavic D (2005) Design Study for a Thick-Film Piezoelectric Actuator in an LTCC Structure. In: Sixth International Conference on Mechanical Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EumSimEGoogle Scholar

Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • C. Bruchmann
    • 1
    Email author
  • B. Höfer
    • 2
  • P. Schreiber
    • 2
  • R. Eberhardt
    • 2
  • W. Buss
    • 2
  • T. Peschel
    • 2
  • S. Gebhardt
    • 3
  • A. Tünnermann
    • 1
    • 2
  • E. Beckert
    • 2
  1. 1.Institute of Applied PhysicsFriedrich Schiller University JenaJenaGermany
  2. 2.Fraunhofer Institut für Optik und FeinmechanikJenaGermany
  3. 3.Fraunhofer Institut für Keramische Technologien und SystemeDresdenGermany

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