Microsystem Technologies

, Volume 12, Issue 12, pp 1133–1141

Correlations between production process, states and mechanical properties of microspecimens made of zirconia

  • B. Kasanická
  • M. Müller
  • M. Auhorn
  • V. Schulze
  • W. Bauer
  • T. Beck
  • H. J. Ritzhaupt-Kleissl
  • D. Löhe
Technical Paper

Abstract

For a safe design of micromechanical components, a reliable database of their properties is required. The existing material properties of macroscopic specimens normally cannot be used due to the neglect of some important aspects of the “micro world”, e.g. the ratio of surface to volume is much higher which results in a larger influence of surface defects on the material strength. Detailed analysis of the microstructure and surface topography of microcomponents in combination with their mechanical properties is very expedient for straight-forward optimization of the manufacturing process. Using the resulting data of the properties investigated, correlations between production process, states and mechanical properties of the micro bending specimens made of ZrO2 using low-pressure injection molding were identified. These correlations will be used to established a concept for dimensioning of mechanically loaded microparts.

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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • B. Kasanická
    • 1
  • M. Müller
    • 2
  • M. Auhorn
    • 1
  • V. Schulze
    • 1
  • W. Bauer
    • 2
  • T. Beck
    • 1
  • H. J. Ritzhaupt-Kleissl
    • 2
  • D. Löhe
    • 1
  1. 1.Institute of Material Science and Engineering IUniversity of KarlsruheKarlsruheGermany
  2. 2.Institute for Materials Research IIIForschungszentrum Karlsruhe GmbHKarlsruheGermany

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