Microsystem Technologies

, Volume 13, Issue 5, pp 523–530

Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments

Technical paper

DOI: 10.1007/s00542-006-0193-0

Cite this article as:
Chung, C.K. & Hong, Y.Z. Microsyst Technol (2007) 13: 523. doi:10.1007/s00542-006-0193-0


This paper reports that the fabrication of the reflowed microlens by the negative tone JSR THB-130 N photoresist can be treated with different thermal treatments using hotplate and oven. The different disk or thin cylinder arrays with diameters of 40–70 μm and thickness of about 7.4 μm were patterned using photolithography technology, and baked at 220°C by two kinds of thermal treatments using hotplate and oven to form reflowed microlens arrays. The spot size of the refractive microlens was then measured by optical microscopy and the total focal length of refractive microlens was simulated by curve fitting the lens profiles. The resolution of the microlens arrays approaches to 400 dpi as coated with Hexamethyldisilizane material. The smallest spot size of about 2.72 μm at the nominal 40 μm microlensis is obtained by the oven heat treatment, and the shortest total focal length of about 150 μm at the nominal 40 μm microlens is achieved by the hotplate heat treatment. The reduced spot size and total focal length of the microlens could improve the density and performance of optical devices and imaging systems.

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.Department of Mechanical Engineering, and Center for Micro/Nano Science and TechnologyNational Cheng Kung UniversityTainanTaiwan, R.O.C.

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