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Microsystem Technologies

, Volume 13, Issue 5–6, pp 483–486 | Cite as

Nanostructures on microstructured surfaces

  • Alexander DischEmail author
  • Jörg Mick
  • Benedikt Bläsi
  • Claas Müller
Technical paper

Abstract

Many applications require the combination of micro- and nanostructures. One interesting combination is to provide the master of a Fresnel lens (microstructure) with a moth-eye anti-reflective layer (nanostructure) (Wilson and Hutley in Opt Acta 29(7):993–1009 1982). Then in replication processes both the Fresnel lens and the anti-reflective layer are replicated in one process step. For example Fresnel lenses can be found in overhead projectors. It is state of the art to endow the planar backside of such a Fresnel lens with an anti-reflective layer. For the front side one would have to put the moth-eye nanostructure onto the Fresnel microstructure. But how to generate the combination of micro- and nanostructures, especially on such a large area? Interference lithography is suited very well for the generation of nanostructures on large areas. It provides a great depth of focus and can be used to generate surface relief nanostructures on already (pre-)microstructured surfaces. Unfortunately, by using conventional interference lithography processes for this purpose several negative effects during lithography prevent a successful exposure. In addition to that spin coating of photo resist on non-planar surfaces results in uneven resist thicknesses throughout the substrate. We have developed a novel, easy process that overcomes all the disadvantages mentioned above and furthermore the process works with almost arbitrary and varying resist thicknesses throughout the substrate. By using this novel process we were able to combine a moth-eye nanostructure with a Fresnel microstructure.

Keywords

PMMA Replication Process Grating Period Fresnel Lens Overhead Projector 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. Disch A (2003) Holographische Mikrostrukturierung prismatischer Oberflächen. Diploma thesis, Laboratory for Process Technology, Department of Microsystems Engineering (IMTEK), University of FreiburgGoogle Scholar
  2. Gombert A (1998) Réseaux diffractifs d’ordre zéro comme surfaces antireflection application aux capteurs solaires. These, Université Strasbourg IGoogle Scholar
  3. Wilson SJ, Hutley MC (1982) The optical properties of moth-eye antireflection surfaces. Opt Acta 29(7):993–1009Google Scholar

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • Alexander Disch
    • 1
    Email author
  • Jörg Mick
    • 2
  • Benedikt Bläsi
    • 2
  • Claas Müller
    • 1
  1. 1.Laboratory for Process Technology, Department of Microsystems Engineering (IMTEK)University of FreiburgFreiburgGermany
  2. 2.Fraunhofer Institute for Solar Energy Systems FreiburgFreiburgGermany

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