Microsystem Technologies

, Volume 11, Issue 7, pp 526–534 | Cite as

A quantitative study on the adhesion property of cured SU-8 on various metallic surfaces

Technical paper
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Abstract

SU-8 has received wide attention in recent years because of its application in the fabrication of high aspect ratio microstructures and devices. This negative resist is known for its excellent lithography properties using ultraviolet light source. As the microfabrication technology based on UV-lithography of SU-8 finds wide applications, a good understanding and characterization of cured SU-8 polymer on various substrate materials are therefore very important. A good adhesion on various substrate materials is essential to both the fabrication process and to the functionality of any final products that have cured SU-8 as part of the structural material. There are very limited studies reported in this important area in the literature. This paper presents a theoretical and experimental work to quantitatively study the adhesion properties of cured SU-8 on some of the most commonly used metallic surface materials. The adhesion strengths of cured SU-8 samples on Au, Ti, Cu, Cr, and Ni coated glass substrates were measured following ASTM-C633 standard. A detailed analysis of the experimental results was also provided based on the atomic structures and electron configurations of the respective metals.

Keywords

Adhesion Strength Metallic Surface Coated Substrate Aluminum Cylinder Separation Load 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgement

This work is supported in whole or in part by the National Science Foundation under Grant Number EPS-0346411 and the State of Louisiana Board of Regents Support Fund.

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Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringLouisiana State UniversityBaton RougeUSA
  2. 2.Center for Advanced Micro-structures and DevicesLouisiana State UniversityBaton RougeUSA

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