Microsystem Technologies

, 12:2

Super-fine ink-jet printing: toward the minimal manufacturing system

  • Kazuhiro Murata
  • Junichi Matsumoto
  • Akira Tezuka
  • Yorishige Matsuba
  • Hiroshi Yokoyama
Technical paper

DOI: 10.1007/s00542-005-0023-9

Cite this article as:
Murata, K., Matsumoto, J., Tezuka, A. et al. Microsyst Technol (2005) 12: 2. doi:10.1007/s00542-005-0023-9

Abstract

We have developed an ink-jet system which allows arrangements of dots with a submicron minimum size. Using an ultra-fine silver paste, we achieved the direct print of metallic wires of only a few micrometers in width without any pre-patterning treatment of the substrate, hydrophobic/hydrophilic patterning, bank patterning etc. We also propose an application, such as direct printing of ultra-fine redistribution wiring for a build-up board and/or package. Since all of these processes can be carried out at atmospheric pressure on the desktop without special treatment of the substrate. The direct fabrication process using ink-jet printing can be expected to be a powerful tool for both nanotechnology research and applications such as micro electronics, etc.

Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  • Kazuhiro Murata
    • 1
  • Junichi Matsumoto
    • 2
  • Akira Tezuka
    • 2
  • Yorishige Matsuba
    • 3
  • Hiroshi Yokoyama
    • 1
  1. 1.Nanotechnology Research InstituteNational Institute of Advanced Industrial Science and TechnologyIbarakiJapan
  2. 2.Research Institute for Computational ScienceNational Institute of Advanced Industrial Science and TechnologyIbarakiJapan
  3. 3.Tsukuba Research centerHarima Chemical Inc.TsukubaJapan

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