Microsystem Technologies

, Volume 12, Issue 1–2, pp 173–179 | Cite as

Integrated electromagnetic microactuators with a large driving force

Technical paper
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Abstract

This paper describes a high power electromagnetic microactuator fabrication method that combines the hard magnetic Fe/Pt process, Ni/Fe permalloy magnetic circuit design, bulk micromachining, and excimer laser ablation. The hard magnetic material Fe/Pt is deposited under low temperature less than 350°C by sputter onto a suspension diaphragm to produce a perpendicular magnetic anisotropic field. The magnetic circuit with closed loop design is applied to concentrate the magnetic flux and increase the magnetic force. The magnetic field induced by the planar coil and Ni/Fe permalloy enhances the interaction with Fe/Pt to induce attractive and repulsive displacement, provide large output force, and operate at high frequency. This high power electromagnetic microactuator is demonstrated with minimum dimensions with a magnetic force two times greater than conventional magnetic micro-actuators.

Keywords

Polyimide Deflection Angle Perpendicular Magnetic Anisotropy Alloy Thin Film Hard Magnetic Material 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgements

This work was supported by the National Science Council (series no. NSC92-2212-E-005-005) and the Ministry of Economic Affairs of Taiwan, R.O.C. Thanks are due to the Mechanical Industry Research Laboratories of the Industrial Technology Research Institute Technology for supporting this study.

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Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  1. 1.Department of Mechanical and Electro-Mechanical EngineeringNational Sun Yat-Sen UniversityKaohsiungTaiwan
  2. 2.Institute of Precision EngineeringNational Chung Hsing UniversityTaichungTaiwan
  3. 3.Mechanical Industry Research LaboratoriesIndustrial Technology Research InstituteHsinchuTaiwan

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