Microsystem Technologies

, Volume 10, Issue 5, pp 387–392

Dynamic modeling of interactions between fields and matter in MEMS devices


DOI: 10.1007/s00542-004-0417-0

Cite this article as:
Zeng, K., Liu, Z. & Korvink, J. Microsystem Technologies (2004) 10: 387. doi:10.1007/s00542-004-0417-0


In this work, we propose an innovative and general mathematical modeling framework with Lagrangian functions of multi-coupled energy domains for MEMS devices in the material frame. Due to the advantage of material descriptions of continua and the uniformity of Lagrangians for different physical domains, this framework simplifies the numerical analyses of MEMS devices.

Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  1. 1.IMTEK-Institute for Microsystem TechnologyUniversity of FreiburgFreiburgGermany

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