Microsystem Technologies

, Volume 10, Issue 5, pp 387–392 | Cite as

Dynamic modeling of interactions between fields and matter in MEMS devices

  • K. ZengEmail author
  • Z. Liu
  • J.G. Korvink


In this work, we propose an innovative and general mathematical modeling framework with Lagrangian functions of multi-coupled energy domains for MEMS devices in the material frame. Due to the advantage of material descriptions of continua and the uniformity of Lagrangians for different physical domains, this framework simplifies the numerical analyses of MEMS devices.


Mathematical Modeling Modeling Framework Lagrangian Function Physical Domain Energy Domain 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  1. 1.IMTEK-Institute for Microsystem TechnologyUniversity of FreiburgFreiburgGermany

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