Microsystem Technologies

, Volume 11, Issue 2–3, pp 80–85 | Cite as

Casimir effect on the pull-in parameters of nanometer switches

Article

Abstract

Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  1. 1.State Key Laboratory of Nonlinear Mechanics (LNM), Institute of MechanicsChinese Academy of SciencesBeijingChina

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