Fabrication of diamond micro tools for ultra precision machining
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State of the art diamond tools for metal-cutting manufacturing are handcrafted by polishing and grinding of natural diamonds. Tools fabricated by these means are serially made unique copies with a limited variety of shapes. Furthermore, manual fabrication leads to deviation from ideal geometry. We present a novel technique for parallel fabrication of diamond micro tools with high contour accuracy by using lithographic methods followed by a modified ASE-process.