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Microsystem Technologies

, Volume 11, Issue 4–5, pp 278–279 | Cite as

Fabrication of diamond micro tools for ultra precision machining

  • E. Ritzhaupt-Kleissl
  • C. MüllerEmail author
  • A. Sossalla
  • S. Ertl
  • P. Gluche
Article

Abstract

State of the art diamond tools for metal-cutting manufacturing are handcrafted by polishing and grinding of natural diamonds. Tools fabricated by these means are serially made unique copies with a limited variety of shapes. Furthermore, manual fabrication leads to deviation from ideal geometry. We present a novel technique for parallel fabrication of diamond micro tools with high contour accuracy by using lithographic methods followed by a modified ASE-process.

Keywords

Operating Procedure Limited Variety Precision Machine Diamond Tool Memory Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • E. Ritzhaupt-Kleissl
    • 1
  • C. Müller
    • 1
    Email author
  • A. Sossalla
    • 2
  • S. Ertl
    • 2
  • P. Gluche
    • 2
  1. 1.Institute for Microsystem Technology (IMTEK)University of FreiburgFreiburgGermany
  2. 2.GFD Gesellschaft für Diamantprodukte mbHDaimlerChrysler ForschungszentrumUlmGermany

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