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Microsystem Technologies

, Volume 11, Issue 4–5, pp 271–277 | Cite as

Fabrication of ceramic microcomponents using deep X-ray lithography

  • C. MüllerEmail author
  • T. Hanemann
  • G. Wiche
  • C. Kumar
  • J. Goettert
Article

Abstract

In the last years the fabrication of micro components made from ceramic materials became more and more evident with respect to the pronounced chemical stability and the outstanding thermomechanical properties in comparison to plastics and metals. The aim of this work is the lithographic generation of ceramic microstructures avoiding an intermediate molding step using SU8 as pronounced sensitive resist matrix filled with fine ceramic powder in the submicron range. Focus of the research was to investigate the composite formation, patterning by x-ray lithography, developing, debinding and sintering to form stable ceramic parts. The addition of fine ceramic particles to low viscous liquids like SU8-10 leads to an increase of the viscosity. For a successful debinding and sintering a volume content of at least 40% ceramic is required resulting in a change of the viscosity from around 2 Pas up to a value of 1000 Pas at 25 °C and low shear rates. A modified casting procedure was developed for the formation of uniform resist films with a thickness around 300 μm. Optimized exposure and development parameters allow the fabrication of good quality resist structures that can be further transformed into ceramic structures by sintering. Details of the work and results will be presented and discussed in this paper.

Keywords

Ceramic Particle Volume Content Thermomechanical Property Ceramic Structure Composite Formation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • C. Müller
    • 1
    Email author
  • T. Hanemann
    • 1
    • 2
  • G. Wiche
    • 1
  • C. Kumar
    • 3
  • J. Goettert
    • 3
  1. 1.Institute for Microsystem Technology (IMTEK)University of FreiburgFreiburgGermany
  2. 2.Research Center KarlsruheInstitute for Materials ResearchKarlsruheGermany
  3. 3.Center for Advanced Microstructures & DevicesLouisiana State UniversityBaton RougeUSA

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