Neural Computing and Applications

, Volume 31, Issue 10, pp 6419–6428 | Cite as

Modeling forces between the probe of atomic microscope and the scanning surface

  • Mohammad Javad SharifiEmail author
  • Ahmad Reza Khoogar
  • Mehdi Tajdari
Original Article


Atomic force microscope (AFM) is usually used to study the properties and surface structure of nanoscale materials. AFMs have three major abilities: force measurement, imaging, and manipulation. In the force measurement, AFM can be used to measure the forces between the probe and the sample as a function of their mutual separation. AFM compared to scanning electron microscope has a single image scan size; also the scanning speed of AFM is also a limitation. AFM images can also be affected by nonlinearity, hysteresis, creep of the piezoelectric material, and cross talk between the x, y, and z axes that may require software enhancement and filtering. Due to the nature of AFM probes, they cannot normally measure steep walls or overhangs in surface. In this study, the force between the Probe of Atomic Microscope and the surface is simulated by using force measurement ability of AFM and artificial neural network. The experimental data are used for training of artificial neural networks. The best model was found to be a feed-forward backpropagation network, with Logsig, Tansig and Tansig transfer functions in successive layers, respectively, and 3 and 2 neurons in the first and second hidden layers. According to the results, the proposed neural network is well capable of modeling the behavior of AFM probes in noncontact mode.


Artificial neural network AFM MEMS Optimal design 


Compliance with ethical standards

Conflict of interest

The authors declare that they have no conflict of interest.


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Copyright information

© The Natural Computing Applications Forum 2018

Authors and Affiliations

  1. 1.Mechanical Engineering DepartmentMalek Ashtar University of TechnologyTehranIran
  2. 2.School of Mechanical EngineeringAzad University Science and Research Branch of ArakArākIran

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