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Computational Mechanics

, Volume 27, Issue 1, pp 23–36 | Cite as

Meshless analysis of piezoelectric devices

  • R. R. Ohs
  • N. R. Aluru

Abstract

 The sensor and actuator properties of piezoelectric materials make them well suited for applications in a variety of microelectromechanical systems (MEMS). Simulating the response of piezoelectric devices requires solving coupled electrical and mechanical partial differential equations. In this paper, we have implemented a meshless point collocation method (PCM) to solve the governing equations. Interpolation functions are constructed from a reproducing kernel approximation, and the governing equations are discretized using a collocation approach. PCM is implemented using either a relaxation algorithm or a fully-coupled algorithm. Comparisons between the two algorithms are given. To demonstrate the performance of PCM, the behavior of two static single-layer problems and a piezoelectric bimorph have been modeled. The bimorph analysis is extended to model a prototype MEMS device.

Keywords

Differential Equation Partial Differential Equation Governing Equation Piezoelectric Material Collocation Method 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2001

Authors and Affiliations

  • R. R. Ohs
    • 1
  • N. R. Aluru
    • 1
  1. 1.Department of General Engineering, Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801

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