Applied Physics B

, Volume 73, Issue 5–6, pp 603–608 | Cite as

Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

  • D.J.W. Klunder
  • E. Krioukov
  • F.S. Tan
  • T. van der Veen
  • H.F. Bulthuis
  • G. Sengo
  • C. Otto
  • H.J.W.M. Hoekstra
  • A. Driessen
Article

Abstract

High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.

PACS: 42.82.Bq; 42.82.Et 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer-Verlag 2001

Authors and Affiliations

  • D.J.W. Klunder
    • 1
  • E. Krioukov
    • 2
  • F.S. Tan
    • 1
  • T. van der Veen
    • 1
  • H.F. Bulthuis
    • 1
  • G. Sengo
    • 1
  • C. Otto
    • 2
  • H.J.W.M. Hoekstra
    • 1
  • A. Driessen
    • 1
  1. 1.Lightwave Devices Group, MESA+ Research Institute, University of Twente, P.O. Box 217, 7 500 AE Enschede, The NetherlandsNL
  2. 2.Biophysical Techniques Group, MESA+ Research Institute, University of Twente, P.O. Box 217, 7 500 AE Enschede, The NetherlandsNL
  3. 3.Kymata Netherlands, Coloseum 11, 7 521 PV, Enschede, The NetherlandsNL

Personalised recommendations