Advertisement

Applied Physics B

, Volume 64, Issue 1, pp 103–109 | Cite as

Multiplex H\(_2\) CARS thermometry in a microwave assisted diamond CVD plasma

  • C.F. Kaminski
  • P. Ewart

Abstract.

Rapid temperature measurements in a low pressure, microwave assisted, diamond CVD plasma are reported. By using a “modeless” laser as the Stokes source for H\(_2\) CARS, accurate single-shot and averaged temperatures were obtained which agreed with values obtained from laser induced fluorescence measurements. The speed of data acquisition afforded by multiplex CARS allowed variations of temperature to be monitored with changing plasma conditions induced by variations of pressure, gas composition and microwave power. The application of the technique for “on-line” monitoring of plasma processes is briefly discussed.

PACS:81.15 Gh; 52.75 Rx; 42.65 Dr 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer-Verlag Berlin Heidelberg 1996

Authors and Affiliations

  • C.F. Kaminski
    • 1
  • P. Ewart
    • 1
  1. 1.Clarendon Laboratory, Oxford University, Parks Road, Oxford, OX1 3PU, U.K. (Fax: +01865 272400, E-mail: p.ewart@physics.oxford.ac.uk)GB

Personalised recommendations