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Applied Physics B

, Volume 119, Issue 3, pp 485–492 | Cite as

Control of Si-rich region inside a sodalime glass by parallel femtosecond laser focusing at multiple spots

  • Masaaki SakakuraEmail author
  • Torataro Kurita
  • Kouhei Yoshimura
  • Naoaki Fukuda
  • Yasuhiko Shimotsuma
  • Kiyotaka Miura
Article

Abstract

Thermal modification and elemental distributions inside a sodalime glass were modified by parallel irradiation with focused 250 and 1 kHz femtosecond laser pulses at multiple spots. We found that the shape of a Si distribution was modified and the position of a Si-rich layer depended on the relative focal positions between 250 and 1 kHz laser pulses. We demonstrated the formation of a ribbon-shaped Si-rich glass of about 8 μm thickness and about 33 μm width by producing a line of a Si-rich layer by translating a glass sample perpendicular to the laser propagation axis. In addition, we simulated transient temperature distribution during laser exposure and discussed the role of 1 kHz laser irradiation in the modulation of elemental distributions.

Keywords

Laser Exposure Modification Line Multiple Spot Transient Temperature Distribution Molten Region 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

This research was supported by JSPS Grant-in-Aid for Scientific Research (A), No. 23246121 and (C), No. 26410240 and by Nippon Sheet Glass Foundation for Materials Science and Engineering.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2015

Authors and Affiliations

  • Masaaki Sakakura
    • 1
    Email author
  • Torataro Kurita
    • 2
  • Kouhei Yoshimura
    • 2
  • Naoaki Fukuda
    • 1
  • Yasuhiko Shimotsuma
    • 2
  • Kiyotaka Miura
    • 2
  1. 1.Office of Society-Academia Collaboration for InnovationKyoto UniversityKyotoJapan
  2. 2.Department of Material Chemistry, Graduate School of EngineeringKyoto UniversityKyotoJapan

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