Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation
- 112 Downloads
The propagation losses (PL) of lithium niobate optical planar waveguides fabricated by swift heavy-ion irradiation (SHI), an alternative to conventional ion implantation, have been investigated and optimized. For waveguide fabrication, congruently melting LiNbO3 substrates were irradiated with F ions at 20 MeV or 30 MeV and fluences in the range 1013–1014 cm−2. The influence of the temperature and time of post-irradiation annealing treatments has been systematically studied. Optimum propagation losses lower than 0.5 dB/cm have been obtained for both TE and TM modes, after a two-stage annealing treatment at 350 and 375∘C. Possible loss mechanisms are discussed.
This work has been supported by Ministerio de Ciencia e Innovación (MICINN) under grant MAT2008-06794-C03. M. Jubera acknowledges his FPI fellowship from MICINN.
- 19.J. Ramiro-Díaz, A. Alcazar de Velasco, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 380, 71 (2009) Google Scholar