Applied Physics B

, Volume 103, Issue 3, pp 547–551

Nanofabrication by magnetic focusing of supersonic beams

  • R. J. Clark
  • T. R. Mazur
  • A. Libson
  • M. G. Raizen
Article

Abstract

We present a new method for nanoscale atom lithography. We propose the use of a supersonic atomic beam, which provides an extremely high brightness and cold source of fast atoms. The atoms are to be focused onto a substrate using a thin magnetic film, into which apertures with widths on the order of 100 nm have been etched. Focused spot sizes near or below 10 nm, with focal lengths on the order of 10 μm, are predicted. Our method can be implemented in a highly parallel manner, enabling simultaneous fabrication of 106 identical elements, and it is applicable both to precision patterning of surfaces with metastable atomic beams and to direct deposition of material.

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References

  1. 1.
    D. Meschede, H. Metcalf, J. Phys. D 36, R17 (2003) ADSCrossRefGoogle Scholar
  2. 2.
    V.I. Balykin, P.N. Melent’ev, Nanotechnol. Russ. 4, 425 (2009) CrossRefGoogle Scholar
  3. 3.
    P. Rai-Choudhury (ed.), Handbook of Microlithography, Micromachining, and Microfabrication (SPIE Optical Engineering Press and the Institution of Electrical Engineers, Bellingham, 1997) Google Scholar
  4. 4.
    L.A. Giannuzzi, F.A. Stevie (eds.), Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer, Berlin, 2005) Google Scholar
  5. 5.
    B. Wu, A. Kumar, Extreme Ultraviolet Lithography (McGraw-Hill, Bellingham, 2009) Google Scholar
  6. 6.
    J.L. O’Brien, A. Furusawa, J. Vuckovic, Nature Photonics 3, 687 (2009) ADSCrossRefGoogle Scholar
  7. 7.
    J.A. Schuller, E.S. Barnard, W. Cai, Y.C. Jun, J.S. White, M.L. Brongersma, Nature Mater. 9, 193 (2010) ADSCrossRefGoogle Scholar
  8. 8.
    V.M. Shalaev, Nature Photonics 1, 41 (2007) ADSCrossRefGoogle Scholar
  9. 9.
    K.S. Johnson, J.H. Thywissen, N.H. Dekker, K.K. Berggren, A.P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998) ADSCrossRefGoogle Scholar
  10. 10.
    M. Baker, A.J. Palmer, W.R. MacGillivray, R.T. Sang, Nanotechnology 15, 1356 (2004) ADSCrossRefGoogle Scholar
  11. 11.
    W. Lu, K.G.H. Baldwin, M.D. Hoogerland, S.J. Buckman, T.J. Senden, T.E. Sheridan, R.W. Boswell, J. Vac. Sci. Technol. B 16, 3846 (1998) CrossRefGoogle Scholar
  12. 12.
    A. Bard, K.K. Berggren, J.L. Wilbur, J.D. Gillaspy, S.L. Rolston, J.J. McClelland, W.D. Phillips, M. Prentiss, G.M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997) CrossRefGoogle Scholar
  13. 13.
    P. Engels, S. Salewski, H. Levsen, K. Sengstock, W. Ertmer, Appl. Phys. B 69, 407 (1999) ADSCrossRefGoogle Scholar
  14. 14.
    Y. Chen, A. Pépin, Electrophoresis 22, 187 (2001) CrossRefGoogle Scholar
  15. 15.
    A.A. Tseng, Small 1, 594 (2005) CrossRefGoogle Scholar
  16. 16.
    S.Y. Chou, P.R. Krauss, P.J. Renstrom, Science 272, 85 (1996) ADSCrossRefGoogle Scholar
  17. 17.
    J.J. McClelland, R.E. Scholten, E.C. Palm, R.J. Celotta, Science 262, 877 (1993) ADSCrossRefGoogle Scholar
  18. 18.
    G. Timp, R.E. Behringer, D.M. Tennant, J.E. Cunningham, M. Prentiss, K.K. Berggren, Phys. Rev. Lett. 69, 1636 (1992) ADSCrossRefGoogle Scholar
  19. 19.
    V. Natarajan, R.E. Behringer, G. Timp, Phys. Rev. A 53, 4381 (1996) ADSCrossRefGoogle Scholar
  20. 20.
    R. Gupta, J.J. McClelland, Z.J. Jabbour, R.J. Celotta, Appl. Phys. Lett. 67, 1378 (1995) ADSCrossRefGoogle Scholar
  21. 21.
    B. Smeets, P. van der Staten, T. Meijer, C.G.C.H.M. Fabrie, K.A.H. van Leeuwen, Appl. Phys. B 98, 697 (2009) ADSCrossRefGoogle Scholar
  22. 22.
    K.K. Berggren, A. Bard, J.L. Wilbur, J.D. Gillaspy, A.G. Helg, J.J. McClelland, S.L. Rolston, W.D. Phillips, M. Prentiss, G.M. Whitesides, Science 269, 1255 (1995) ADSCrossRefGoogle Scholar
  23. 23.
    I.S. Averbukh, R. Arvieu, Phys. Rev. Lett. 87, 163601 (2001) ADSCrossRefGoogle Scholar
  24. 24.
    W.H. Oskay, D.A. Steck, M.G. Raizen, Phys. Rev. Lett. 89, 163601 (2002) CrossRefGoogle Scholar
  25. 25.
    W.G. Känders, F. Lison, A. Richter, R. Wynands, D. Meschede, Nature 375, 214 (1995) ADSCrossRefGoogle Scholar
  26. 26.
    W.G. Kaenders, F. Lison, I. Müller, A. Richter, R. Wynands, D. Meschede, Phys. Rev. A 54, 5067 (1995) ADSCrossRefGoogle Scholar
  27. 27.
    R.R. Chaustowski, V.Y.F. Leung, K.G.H. Baldwin, Appl. Phys. B 86, 491 (2007) ADSCrossRefGoogle Scholar
  28. 28.
    P.N. Melentiev, A.V. Zablotskiy, D.A. Lapshin, E.P. Sheshin, A.S. Baturin, V.I. Balykin, Nanotechnology 20, 235301 (2009) ADSCrossRefGoogle Scholar
  29. 29.
    R. Campargue (ed.), Atom and Molecular Beams: The State of the Art 2000 (Springer, Berlin, 2001) Google Scholar
  30. 30.
    H. Pauly, Atom, Molecule and Clusterbeams I: Basic Theory, Production, and Detection of Thermal Energy Beams (Springer, Berlin, 2000) Google Scholar
  31. 31.
    J.R. Buckland, Ph.D. thesis, University of Cambridge, Cambridge, UK (1998) Google Scholar
  32. 32.
    M.D. Hoogerland, J.P.J. Driessen, E.J.D. Vredenbregt, H.J.L. Megens, M.P. Schuwer, H.C.W. Beijerinck, K.A.H. van Leeuwen, in Proceedings of the 1994 IEEE International Frequency Control Symposium (IEEE, New York, 1994), p. 651 Google Scholar
  33. 33.
    E. Rasel, F.P.D. Santos, F.S. Pavone, F. Perales, C.S. Unnikrishnan, M. Leduc, Eur. J. Phys. D 7, 311 (1999) ADSCrossRefGoogle Scholar
  34. 34.
    Y.T. Xing, I. Barb, R. Gerritsma, R.J.C. Spreeuw, H. Luigjes, Q.F. Xiao, C. R’etif, J.B. Goedkoop, J. Magn. Magn. Mater. 313, 192 (2007) ADSCrossRefGoogle Scholar
  35. 35.
    T. Fernholz, R. Gerritsma, S. Whitlock, I. Barb, R.J.C. Spreeuw, Phys. Rev. A 77, 033409 (2008) ADSCrossRefGoogle Scholar
  36. 36.
    D.W. Keith, M.L. Schattenburg, H.I. Smith, D.E. Pritchard, Phys. Rev. Lett. 61, 1580 (1988) ADSCrossRefGoogle Scholar
  37. 37.
    E. Narevicius, A. Libson, C.G. Parthey, I. Chavez, J. Narevicius, U. Even, M.G. Raizen, Phys. Rev. Lett. 100, 093003 (2008) ADSCrossRefGoogle Scholar
  38. 38.
    D. Loss, D.P. DiVincenzo, Phys. Rev. A 57, 120 (1998) ADSCrossRefGoogle Scholar
  39. 39.
    A. Imamoglu, D.D. Awschalom, G. Burkard, D.P. DiVincenzo, D. Loss, M. Sherwin, Phys. Rev. Lett. 83, 4204 (1999) ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • R. J. Clark
    • 1
  • T. R. Mazur
    • 1
  • A. Libson
    • 1
  • M. G. Raizen
    • 1
  1. 1.Center for Nonlinear Dynamics and Department of PhysicsThe University of Texas at AustinAustinUSA

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