Applied Physics B

, Volume 100, Issue 3, pp 453–459 | Cite as

Highly confined and continuous single-mode operation of self-align photonic crystal oxide VCSEL

  • M. S. AliasEmail author
  • S. Shaari
  • P. O. Leisher
  • K. D. Choquette


In this letter, we report on single-mode operation of originally multi-mode oxide VCSEL by using etched photonic crystal air holes and unique trench structure. The device fabrication utilized conventional photolithography; with simplified lithography step of self-aligning the photonic crystal and trench structures to the laser aperture for efficient and vigorous device processing. The fabricated photonic crystal VCSEL with trench device exhibits a single-mode output power of 0.7 mW, threshold current of 3.5 mA, slope efficiency of 0.10 W/A, and continuous single-mode output spectra at wide operating current range. The results are compared with conventional multi-mode oxide VCSEL of similar device geometry. In addition, theoretical analysis is presented for developing further understanding of the photonic crystal VCSEL.


Trench Photonic Crystal IEEE Photon Side Mode Suppression Ratio Oxide Aperture 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • M. S. Alias
    • 1
    Email author
  • S. Shaari
    • 2
  • P. O. Leisher
    • 3
  • K. D. Choquette
    • 4
  1. 1.Microelectronics & Nanotechnology ProgramTelekom Malaysia Research & Development (TMR&D)CyberjayaMalaysia
  2. 2.Institute of Microengineering & Nanoelectronics (IMEN)National University of Malaysia (UKM)BangiMalaysia
  3. 3.nLight CorporationVancouverUSA
  4. 4.Electrical & Computer Engineering DepartmentUniversity of Illinois at Urbana Champaign (UIUC)UrbanaUSA

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