Applied Physics B

, Volume 94, Issue 2, pp 295–299

Enhanced refractive index well-confined planar and channel waveguides in KTiOPO4 produced by MeV C3+ ion implantation with low dose



We report on the fabrication and characterization of planar and channel waveguides in KTiOPO4 crystals by 6.0 MeV C3+ ion implantation with the dose of 1×1014 ions/cm2. The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. An increase of the both nx and ny refractive indices induced by the annealing after implantation is believed to be responsible for waveguide formation. The bright near-field intensity distribution of the transverse-electric and transverse-magnetic modes in the annealed channel waveguide was collected and studied by end-coupling method.


42.82Et 61.80Jh 


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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  1. 1.School of PhysicsShandong UniversityJinanChina
  2. 2.Department of PhysicsJining UniversityQufuChina
  3. 3.State Key Laboratory of Crystal MaterialsShandong UniversityJinanChina
  4. 4.School of Chemistry and Chemical EngineeringShandong UniversityJinanChina
  5. 5.The State Key Laboratory of Nuclear Physics and TechnologyPeking UniversityBeijingChina

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