Applied Physics B

, 87:85 | Cite as

Direct joining of glass substrates by 1 kHz femtosecond laser pulses

Article

Abstract

When a femtosecond laser pulse is focused at the interface of two transparent substrates, localised melting and quenching of the two substrates occur around the focal volume, bridging them due to nonlinear absorption. The substrates can then be joined by resolidification of the materials. We investigate the optimum irradiation conditions needed to join borosilicate glass substrates and fused silica substrates using a 1 kHz 800 nm Ti:sapphire amplifier. We characterised the joint strength and the transmittance through joint volumes as a function of laser energy and translation velocity. We found that a joining strength as large as 14.9 MPa could be obtained in both fused silica and borosilicate glass. Annealing the joint samples led to an increase in the joint strength.

Keywords

Fuse Silica Laser Energy Femtosecond Laser Borosilicate Glass Femtosecond Laser Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    K.M. Davis, K. Miura, N. Sugimoto, K. Hirao, Opt. Lett. 21, 1729 (1996)ADSCrossRefGoogle Scholar
  2. 2.
    C.B. Schaffer, A. Brodeur, J.F. García, E. Mazur, Opt. Lett. 26, 93 (2001)ADSGoogle Scholar
  3. 3.
    L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, Opt. Commun. 171, 279 (1999)CrossRefADSGoogle Scholar
  4. 4.
    K. Kawamura, N. Sarukura, M. Hirano, H. Hosono, Appl. Phys. Lett. 78, 1038 (2001)CrossRefADSGoogle Scholar
  5. 5.
    W. Watanabe, D. Kuroda, K. Itoh, J. Nishii, Opt. Express 10, 978 (2002)ADSGoogle Scholar
  6. 6.
    W. Watanabe, T. Asano, K. Yamada, K. Itoh, J. Nishii, Opt. Lett. 28, 2491 (2003)ADSGoogle Scholar
  7. 7.
    R. Osellame, S. Taccheo, M. Marangoni, R. Ramponi, P. Laporta, D. Polli, S.D. Silvestri, G. Cerullo, J. Opt. Soc. Am. B 20, 1559 (2003)ADSGoogle Scholar
  8. 8.
    S. Nolte, M. Will, J. Burghoff, A. Tuennermann, Appl. Phys. A 77, 109 (2003)CrossRefADSGoogle Scholar
  9. 9.
    R.S. Taylor, C. Hnatovsky, E. Simova, D.M. Rayner, M. Mehandale, V.R. Bhardwaj, P.B. Corkum, Opt. Express 11, 775 (2003)ADSCrossRefGoogle Scholar
  10. 10.
    Y. Cheng, K. Sugioka, K. Midorikawa, Opt. Lett. 29, 2007 (2004)CrossRefADSGoogle Scholar
  11. 11.
    Y. Li, Y. Dou, R. An, H. Yang, Q. Gong, Opt. Express 13, 2433 (2005)CrossRefADSGoogle Scholar
  12. 12.
    Y. Hayasaki, T. Sugimoto, A. Takita, N. Nishida, Appl. Phys. Lett. 87, 031101 (2005)CrossRefADSGoogle Scholar
  13. 13.
    L. Shah, A.Y. Arai, S.M. Eaton, P.R. Herman, Opt. Express 13, 1999 (2005)CrossRefADSGoogle Scholar
  14. 14.
    S. Juodkazis, K. Nishimura, S. Tanaka, H. Misawa, E.G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, V.T. Tikhonchuk, Phys. Rev. Lett. 96, 166101 (2006)CrossRefADSGoogle Scholar
  15. 15.
    P.H. Carr, J. Acoust. Soc. Am. 37, 927 (1965)CrossRefADSGoogle Scholar
  16. 16.
    H.I. Smith, J. Acoust. Soc. Am. 37, 928 (1965)CrossRefADSGoogle Scholar
  17. 17.
    T. Rogers, J. Kowal, Sens. Actuators A 46–47, 113 (1995)CrossRefGoogle Scholar
  18. 18.
    H. Nakanishi, T. Nishimoto, R. Nakamura, A. Yotsumoto, T. Yoshida, S. Shoji, Sens. Actuators A 79, 237 (2000)CrossRefGoogle Scholar
  19. 19.
    T.M.H. Lee, D.H.Y. Lee, C.Y.N. Liaw, A.I.K. Lao, I.M. Hsin, Sens. Actuators A 86, 103 (2000)CrossRefGoogle Scholar
  20. 20.
    P.W. Barth, Sens. Actuators A 21–23, 919 (1990)CrossRefGoogle Scholar
  21. 21.
    M. Wild, A. Gillner, R. Poprawe, Sens. Actuators A 93, 63 (2001)CrossRefGoogle Scholar
  22. 22.
    A.W.Y. Tan, F.E.H. Tay, Sens. Actuators A 120, 550 (2005)CrossRefGoogle Scholar
  23. 23.
    T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Japan. J. Appl. Phys. Part 2 44, L687 (2005)CrossRefGoogle Scholar
  24. 24.
    J.W. Chan, T. Huser, S. Risbud, D.M. Krol, Opt. Lett. 26, 1726 (2001)ADSGoogle Scholar
  25. 25.
    W. Watanabe, S. Onda, T. Tamaki, K. Itoh, J. Nishii, Appl. Phys. Lett. 89, 021106 (2006)CrossRefADSGoogle Scholar
  26. 26.
    S.P. Timoshenko, J.N. Goodier, Theory of elasticity, 3rd edn. (McGraw-Hill, New York, 1970)Google Scholar
  27. 27.
    K. Yamada, W. Watanabe, T. Toma, K. Itoh, J. Nishii, Opt. Lett. 26, 19 (2001)ADSGoogle Scholar
  28. 28.
    D. Homoelle, S. Wielandy, A.L. Gaeta, N.F. Borrelli, C. Smith, Opt. Lett. 24, 1311 (1999)ADSGoogle Scholar
  29. 29.
    L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, Opt. Commun. 191, 333 (2001)CrossRefADSGoogle Scholar
  30. 30.
    S. Onda, W. Watanabe, K. Yamada, K. Itoh, J. Nishii, J. Opt. Soc. Am. B 22, 2437 (2005)CrossRefADSGoogle Scholar
  31. 31.
    A. Saliminia, N.T. Nguyen, S.L. Chin, R. Vallée, J. Appl. Phys. 99, 093104 (2006)CrossRefADSGoogle Scholar
  32. 32.
    K. Yamada, W. Watanabe, J. Nishii, K. Itoh, Japan. J. Appl. Phys. Part 1 42, 6916 (2003)CrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.Photonics Research InstituteNational Institute of Advanced Industrial Science and TechnologyOsakaJapan
  2. 2.Department of Material and Life Science, Graduate School of EngineeringOsaka UniversityOsakaJapan

Personalised recommendations