Applied Physics B

, Volume 86, Issue 1, pp 151–154 | Cite as

Fabrication and stitching of embedded multi-layer micro-gratings in fused silica glass by fs laser pulses

  • J. Liu
  • Z. Zhang
  • Z. Lu
  • G. Xiao
  • F. Sun
  • S. Chang
  • C. Flueraru


Fabrication and stitching of internal 2D, 1D and multi-layer micro-gratings in fused silica glass using amplified Ti:sapphire femtosecond laser were reported. These gratings have the pitch of 4 μm and the size of 400 μm×400 μm. For a two-layer 1D micro-grating where a second-layer grating was overwritten on a first-layer grating at the exact X,Y position and the different Z depth, the diffraction efficiency can reach more than 25% due to the grating thickness increase. If a second-layer grating was stitched with a first-layer by the shift of 2 μm in the X direction and at the different Z depth, the diffraction angle was doubled but the diffraction efficiency was about 9%. The last result has the potential application for fabricating high-density micro-/nano-structures beyond the diffraction limit through 3D stitching.


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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • J. Liu
    • 1
  • Z. Zhang
    • 1
  • Z. Lu
    • 1
  • G. Xiao
    • 1
  • F. Sun
    • 1
  • S. Chang
    • 1
  • C. Flueraru
    • 1
  1. 1.Institute for Microstructural SciencesNational Research Council of CanadaOttawaCanada

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