Applied Physics B

, Volume 84, Issue 1–2, pp 265–267 | Cite as

High-resolution capability of optical near-field imprint lithography

  • T. YatsuiEmail author
  • Y. Nakajima
  • W. Nomura
  • M. Ohtsu


We propose a novel method to increase the resolution of imprint lithography by introducing strong localization of the optical near-field intensity, depending on the mold structure. By optimizing the thickness of the metallic film on a SiO2 line-and-space (LS) mold without a sidewall coating, we confirmed that the optical near-field strongly localizes at the edge of the mold, using a finite-difference time-domain calculation method. Based on the calculated results, we performed optical near-field imprint lithography using a mold with metallized (20-nm-thick Al without a sidewall coating) SiO2 LS with a 300-nm half-pitch that was 200-nm deep with illumination using the g-line (λ=436 nm), and obtained features as narrow as 50 nm wide.


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  1. 1.
    T. Ito, M. Ogino, T. Yamada, Y. Inao, T. Yamaguchi, T. Mizutani, R. Kuroda, J. Photopoly. Sci. Technol. 18, 435 (2003)CrossRefGoogle Scholar
  2. 2.
    S.Y. Chou, P.R. Krauss, W. Zhang, L. Guo, L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997)CrossRefGoogle Scholar
  3. 3.
    M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon, S.Y. Chou, Appl. Phys. Lett. 84, 5299 (2004)ADSCrossRefGoogle Scholar
  4. 4.
    The computer simulations in this paper are performed by a FDTD-based program, Poynting for Optics, a product of Fujitsu, JapanGoogle Scholar
  5. 5.
    E.D. Palik (Ed.), Handbook of Optical Constants of Solids (Academic, New York, 1985)Google Scholar
  6. 6.
    H. Raether (Ed.), Surface Plasmons (Springer-Verlag, Berlin, 1988)Google Scholar
  7. 7.
    J. Haisma, M. Verheijen, K. van den Heuvel, J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996)CrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.Solution-Oriented Research for Science and Technology (SORST)Japan Science and Technology AgencyTokyoJapan
  2. 2.School of EngineeringThe University of TokyoTokyoJapan

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