Applied Physics B

, Volume 80, Issue 4–5, pp 581–585 | Cite as

Investigation of physical properties of quartz after focused ion beam bombardment

Article

Abstract

Optical properties (transmission and refractive index) and phase change (from amorphous to crystal) of a commonly used glass, quartz, were investigated before and after focused ion beam (FIB) bombardment with ion energy from 30 to 50 keV. We found different influences of FIB bombardment on the optical properties and chemical structure of the quartz in the wavelength region of visible and near infrared, respectively. The quartz still can be used in the infrared wavelength for conventional optical applications. As an application example, an array of diffractive optical elements (DOEs) was directly fabricated on the quartz by the FIB milling. The measured diffraction efficiency of the DOEs is 83.5%, which is acceptable for practical use.

PACS

07.85.Nc 07.85.Jy 07.60.Hv 78.20-e 

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References

  1. Y. Fu, N.K.A. Bryan, Opt. Express 7, 141 (2000)Google Scholar
  2. Y. Fu, N.K.A. Bryan, Appl. Opt. 40, 5872 (2001)Google Scholar
  3. Y. Fu, N.K.A. Bryan, Opt. Express 12, 227 (2004)Google Scholar
  4. Y. Fu, N.K.A. Bryan, IEEE Photonics Technol. Lett. 13, 424 (2001)Google Scholar
  5. Y. Fu, N.K.A. Bryan, Opt. Eng. 40, 511 (2001)Google Scholar
  6. Y. Fu, N.K.A. Bryan, W. Zhou, Opt. Express 12, 1803 (2004)Google Scholar
  7. J. Melngailis, J. Vac. Sci. Technol. B 5, 469 (1987)Google Scholar
  8. Commonly used software for simulation and analysis of ion beam processing. Available at http://www.srim.org/srim/srimlegl.hGoogle Scholar
  9. E.D. Palik (ed.), Handbook of Optical Constants of Solids (Academic, New York, 1985)Google Scholar
  10. J.C. Pivin, M. Sendova, M. Nikolaeva, D. Dimova-Malinovska, A. Martucci, Appl. Phys. A 75, 401 (2002)Google Scholar
  11. U. Kriebig, M. Vollmer, Optical Properties of Metal Clusters, Springer Ser. Mater. Sci., vol 25 (Springer, Berlin Heidelberg New York, 1996)Google Scholar
  12. M.A. Garcia, J. Llpois, S.E. Paje, Chem. Phys. Lett. 315, 313 (1999)Google Scholar
  13. Y. Fu, N.K.A. Bryan, Holography, Diffractive Optics and Applications II. SPIE Proc., vol 5636 (in press) Author: Please update the Ref. [13]. Google Scholar

Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  1. 1.Innovation in Manufacturing Systems and Technology (IMST) Program, SingaporeMassachusetts Institute of Technology (MIT) AllianceSingapore
  2. 2.School of Mechanical and Production EngineeringNanyang Technological UniversitySingapore

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