Applied Physics A

, Volume 69, Supplement 1, pp S39–S43 | Cite as

Pulsed laser deposition of silicate phosphor thin films

  • X.W. Sun
  • H.S. Kwok

Abstract.

Three types of silicate phosphor thin films, emitting in the red-green-blue (RGB) primary colors, were fabricated by pulsed laser deposition, including manganese and lead doped calcium silicate (CaSiO3:MnPb) for red color, manganese doped zinc silicate (Zn2SiO4:Mn) for green color and cerium doped yttrium silicate (Y2SiO5:Ce) for blue color. A correlation was observed between photoluminescence intensity with film crystallinity and surface morphology. RGB phosphor thin films with excellent color saturation were obtained. Luminescence mechanisms for these phosphor thin films are discussed.

PACS: 18.20.-e; 81.15.Fg; 18.55.-m 
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Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • X.W. Sun
    • 1
  • H.S. Kwok
    • 2
  1. 1.Division of Microelectronics, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798SG
  2. 2.Department of Electrical and Electronic Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, P.R. ChinaCN

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