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Applied Physics A

, Volume 72, Issue 5, pp 581–585 | Cite as

Chemical composition and charge stability of highly crystalline pulsed-laser-deposited polytetrafluoroethylene films on metal substrates

  • N. Huber
  • J. Heitz
  • D. Bäuerle
  • R. Schwödiauer
  • S. Bauer
  • H. Niino
  • A. Yabe

Abstract.

KrF excimer-laser ablation of sintered-powder polytetrafluoroethylene (PTFE) targets is used for the deposition of high-quality PTFE films on metallic microstructures and metal backplates for electroacoustic applications. The films are found to be highly crystalline, consisting of large spherulites with diameters up to 1 mm. X-ray photoelectron spectroscopy of the films revealed the chemical similarity of press-sinter target pulsed-laser-deposited films with bulk PTFE. Negatively charged PTFE films on stainless steel backplates exhibit an exceptional charge stability with practically no decrease of the surface potential up to 225 °C in open-circuit thermally stimulated discharge.

PACS: 81.15.Fg; 68.55.-a; 77.55.+f 

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Copyright information

© Springer-Verlag 2001

Authors and Affiliations

  • N. Huber
    • 1
  • J. Heitz
    • 1
  • D. Bäuerle
    • 1
  • R. Schwödiauer
    • 1
  • S. Bauer
    • 1
  • H. Niino
    • 2
  • A. Yabe
    • 2
  1. 1.Applied Physics, Johannes-Kepler-University Linz, 4040 Linz, AustriaAT
  2. 2.National Institute of Materials and Chemical Research (NIMC), Higashi 1–1, Tsukuba, Ibaraki 305, JapanJP

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