Applied Physics A

, Volume 69, Supplement 1, pp S455–S457 | Cite as

Study of laser-deposited metallic thin films by a combination of high-resolution ex situ and time-resolved in situ experiments

  • M. Störmer
  • K. Sturm
  • S. Fähler
  • M. Weisheit
  • J. Winkler
  • S. Kahl
  • Ph. Kesten
  • A. Pundt
  • M. Seibt
  • S. Senz
  • H.-U. Krebs

Abstract.

Laser-deposited metallic alloys and multilayers were studied in detail by a combination of high-resolution ex situ and time-resolved in situ experiments. The purpose of these experiments is to better understand the special properties of laser-deposited metallic films in comparison with conventionally prepared thin films. During deposition, thickness, resistance, and electron diffraction (THEED) experiments show that the film surface is resputtered, local mixing at the interfaces of multilayers on a nanometre scale occurs, and metastable phases up to large film thicknesses are formed. After deposition, a compressive stress of 1–2 GPa was measured using four-circle diffractometry, and growth defects were observed on an atomic scale by electron microscopy (HRTEM) and field ion microscopy (FIM). The obtained structural details of the metallic films can be explained by an implantation model for the laser deposition process.

PACS: 68.55.-a 

Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • M. Störmer
    • 1
  • K. Sturm
    • 1
  • S. Fähler
    • 1
  • M. Weisheit
    • 1
  • J. Winkler
    • 1
  • S. Kahl
    • 1
  • Ph. Kesten
    • 1
  • A. Pundt
    • 1
  • M. Seibt
    • 2
  • S. Senz
    • 3
  • H.-U. Krebs
    • 1
  1. 1.Institut für Materialphysik, Universität Göttingen, Hospitalstrasse 3–7, 37073 Göttingen and SFB 345, Germany (Fax: +49-551/507-1750, E-mail: krebs@umpsun1.gwdg.de)DE
  2. 2.IV. Physikalisches Institut, Universität Göttingen, Bunsenstrasse 13–15, 37073 Göttingen, GermanyDE
  3. 3.MPI für Mikrostrukturphysik, Weinberg 2, 06120 Halle/Saale, GermanyDE

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