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Applied Physics A

, Volume 66, Supplement 1, pp S421–S426 | Cite as

Scanning capacitance microscope as a tool for the characterization of integrated circuits

  • A. Born
  • R. Wiesendanger
Regular paper

Keywords

Integrate Circuit Scan Capacitance Microscope 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer-Verlag 1998

Authors and Affiliations

  • A. Born
    • 1
  • R. Wiesendanger
    • 1
  1. 1.Institute of Applied Physics and Microstructure Research Center, University of Hamburg, Jungiusstrasse 11, D-20355 Hamburg, GermanyDE

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