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Applied Physics A

, Volume 69, Issue 2, pp 241–244 | Cite as

Synthesis of carbon nitride films by low-power inductively coupled plasma-activated transport reactions from a solid carbon source

  • C. Popov
  • M.F. Plass
  • A. Bergmaier
  • W. Kulisch
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Abstract.

Thin films of carbon nitride were prepared by low-power inductively coupled plasma chemical vapor deposition from a solid carbon source by utilizing transport reactions. The maximum deposition rate achieved was 10 nm/min and depended mainly on the substrate position in the reactor. The nitrogen fraction in the films was not so sensitive to the process parameters and was at about 0.5 for all experiments as measured by Auger electron spectroscopy (AES) and elastic recoil detection (ERD) analysis. The chemical bonding structure studied by Fourier transform infrared (FTIR) spectroscopy and X-ray photoelectron spectroscopy (XPS) showed the presence of triple, double and single bonds between carbon and nitrogen atoms.

PACS: 81.15.Gh; 68.55.-a 

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Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • C. Popov
    • 1
  • M.F. Plass
    • 1
  • A. Bergmaier
    • 2
  • W. Kulisch
    • 1
  1. 1.University of Kassel, Institute of Technical Physics, Heinrich-Plett-Str. 40, 34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: popov@schottky.physik.uni-kassel.de)DE
  2. 2.Technical University of Munich, Dept. of Physics E 12, James-Franck-Str., 85747 Garching, GermanyDE

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