Surface microstructure/miniature mass spectrometer:.processing and applications
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. Its fabrication is based on techniques used in microsystem processing and in particular anisotropic etching, thin film deposition, electroplating, and anodic bonding. The mass spectrometer consists of a plasma electron source for measurand ionisation as well as an ion optic and a mass separator specifically designed for the system’s small dimensions.
KeywordsThin Film Mass Spectrometer Small Dimension Film Deposition Plasma Electron
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