Applied Physics A

January 1998, Volume 66, Issue 1, pp 83–86 | Cite as

Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation

• Authors
• Authors and affiliations

• F. Sánchez
• J.L. Morenza
• R. Aguiar
• J.C. Delgado
• M. Varela

Regular paper

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• 100 Downloads
• 34 Citations

PACS: 81.40 Z; 81.60 Z; 68.70 

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Copyright information

© Springer-Verlag 1998

Authors and Affiliations

• F. Sánchez
  • 1
• J.L. Morenza
  • 1
• R. Aguiar
  • 1
• J.C. Delgado
  • 1
• M. Varela
  • 1

1. 1.Universitat de Barcelona, Departament de Física Aplicada i Electrònica, Avda. Diagonal 647, E-08028 Barcelona, Spain (Fax: +34-3/402-1138, E-mail: fsanchez@electra.fae.ub.es)ES