Applied Physics A

, Volume 66, Issue 1, pp 35–42

Ultrashort pulse laser ablation of silicon: an MD simulation study

  • R.F.W. Herrmann
  • J. Gerlach
  • E.E.B. Campbell
Regular paper

PACS: 79.20.Ds; 61.80.Az 

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Copyright information

© Springer-Verlag 1998

Authors and Affiliations

  • R.F.W. Herrmann
    • 1
  • J. Gerlach
    • 2
  • E.E.B. Campbell
    • 1
  1. 1.Max-Born Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Postfach 1107, D-12474 Berlin-Adlershof, Germany (Fax: +49 30 6392 1229, E-mail: campbell@mbi.fta-berlin.de)DE
  2. 2.GMD-FIRST, Rudower Chaussee 5, 12489 Berlin-Adlershof, GermanyDE

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