Applied Physics A

, Volume 65, Issue 3, pp 259–261 | Cite as

Excimer-laser ablation and micro-patterning of ceramic Si3N4

  • J. Heitz
  • J.D. Pedarnig
  • D. Bäuerle
  • G. Petzow

3

N4 has been investigated. The ablation threshold in air, Φth, is around 0.3±0.1 J/cm2 with ArF- and 0.9±0.2 J/cm2 with KrF-laser radiation. With fluences Φth<Φ<4 J/cm2 the irradiated surface is either very flat or it exhibits a cone-type structure, depending on the number of laser pulses employed. With fluences of 5 to 10 J/cm2, the sample surface becomes very smooth, much smoother than the original mechanically polished surface. Pores, scratches, and cracks observed on the non-irradiated surface are absent within the illuminated area. In this regime, the ablation rates are typically 0.1 to 0.2 μm/pulse.

PACS: 42.55G; 68.35; 81.40; 82.65 

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Copyright information

© Springer-Verlag 1997

Authors and Affiliations

  • J. Heitz
    • 1
  • J.D. Pedarnig
    • 1
  • D. Bäuerle
    • 1
  • G. Petzow
    • 2
  1. 1.Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, AustriaAT
  2. 2.MPI für Metallforschung, Institut für Werkstoffwissenschaften, D-70569 Stuttgart, GermanyDE

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