Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump
Dynamics of a thin gold film on a silica substrate triggered by fast heating with the use of a subpicosecond laser pulse is studied. The pressure waves generated by such heating may result in spalling (delamination) of the film and its flying away from the substrate after an acoustic time defined by the film thickness and speed of sound in metal. Intensity of the heating laser beam has the spatial Gaussian distribution in a cross section. Therefore, the heating of film surface is non-uniform along cylindrical radius measured from the beam axis. As a result of such heating, the velocity distribution in material flying away from the substrate has a maximum at the beam axis. Thus, the separated film has dome-like shape which inflates with time. Volume of an empty cavity between the separated film and the substrate increases during inflation. Typical flight velocities are in the range of 30–200 m/s. The inflation stage can last from few to several tens of nanoseconds if the diffraction-limited micron-sized laser focal spots are used. Capillary forces acting along the warped flying film decelerate the inflation of dome. Capillary deceleration of a bulging dome focuses mass flow along the dome shell in the direction of its axis. This results in formation of an axial jet and droplet in a tip of the dome. Our new simulation results and comparisons with experiments are presented. The results explain appearance of debris in a form of frozen droplets on a surface of an irradiated spot. This is the consequence of the capillary return of a droplet.
KeywordsMolecular Dynamic Monte Carlo Marangoni Effect Electron Thermal Conductivity Liquid Part
Authors thank RSCF (14-19-01599).
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