Applied Physics A

, 122:233

Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications

  • Ville Kekkonen
  • Saumyadip Chaudhuri
  • Fergus Clarke
  • Juho Kaisto
  • Jari Liimatainen
  • Santhosh Kumar Pandian
  • Jarkko Piirto
  • Mikael Siltanen
  • Aleksey Zolotukhin
Article

DOI: 10.1007/s00339-016-9760-0

Cite this article as:
Kekkonen, V., Chaudhuri, S., Clarke, F. et al. Appl. Phys. A (2016) 122: 233. doi:10.1007/s00339-016-9760-0
Part of the following topical collections:
  1. Emerging trends in photo-excitations and promising new laser ablation technologies

Abstract

Recent results of properties and performance of \(\hbox {WO}_3\) gas sensing layers produced by industrial picosecond pulsed laser deposition process developed by Picodeon Ltd Oy are presented in this paper. \(\hbox {WO}_3\) layers with controllable porosity and nanostructure were successfully deposited on commercial sensor platforms, and basic measurements to characterize their performance as gas sensors gave promising results.

Funding information

Funder NameGrant NumberFunding Note
Seventh Framework Programme
  • 604311

Copyright information

© Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Ville Kekkonen
    • 1
  • Saumyadip Chaudhuri
    • 1
  • Fergus Clarke
    • 1
  • Juho Kaisto
    • 1
  • Jari Liimatainen
    • 1
  • Santhosh Kumar Pandian
    • 1
  • Jarkko Piirto
    • 1
  • Mikael Siltanen
    • 1
  • Aleksey Zolotukhin
    • 1
  1. 1.Picodeon Ltd OyIiFinland

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