Applied Physics A

, 122:233 | Cite as

Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications

  • Ville Kekkonen
  • Saumyadip Chaudhuri
  • Fergus Clarke
  • Juho Kaisto
  • Jari Liimatainen
  • Santhosh Kumar Pandian
  • Jarkko Piirto
  • Mikael Siltanen
  • Aleksey Zolotukhin
Article
Part of the following topical collections:
  1. Emerging trends in photo-excitations and promising new laser ablation technologies

Abstract

Recent results of properties and performance of \(\hbox {WO}_3\) gas sensing layers produced by industrial picosecond pulsed laser deposition process developed by Picodeon Ltd Oy are presented in this paper. \(\hbox {WO}_3\) layers with controllable porosity and nanostructure were successfully deposited on commercial sensor platforms, and basic measurements to characterize their performance as gas sensors gave promising results.

References

  1. 1.
    J. Huotari, J. Lappalainen, J. Puustinen, T. Baur, C. Alépée, T. Haapalainen, S. Komulainen, J. Pylvänäinen, A.L. Spetz, Proc. Eng. 120, 1158–1161 (2015)Google Scholar
  2. 2.
    T. Ohkagi, R. Matsuoka, K. Watanabe, K. Matsumoto, Y. Adachi, I. Sakaguchi, S. Hishita, N. Ohashi, H. Haneda, Sens. Actuators B 150, 99–104 (2010)CrossRefGoogle Scholar
  3. 3.
    A. Bailini, F. Di Fonzo, M. Fusi, C.S. Casari, Bassi A. Li, V. Russo, A. Baserga, C.E. Bottani, Appl. Surf. Sci. 253, 8130–8135 (2007)ADSCrossRefGoogle Scholar
  4. 4.
    F. Mitsugi, E. Hiraiwa, T. Ikegami, K. Ebihara, Surf. Coat. Technol. 169–170, 553–556 (2003)CrossRefGoogle Scholar
  5. 5.
    Y.-K. Chung, M.-H. Kim, W.-S. Um, H.-S. Lee, J.-K. Song, S.-C. Choi, K.-M. Yi, M.-J. Lee, K.-W. Chung, Sens. Actuators B 60, 49–56 (1999)CrossRefGoogle Scholar
  6. 6.
    A.S. Garde, J. Alloys Compd. 617, 367–373 (2014)CrossRefGoogle Scholar
  7. 7.
    M. Ahsan, M.Z. Ahmad, T. Tesfamichael, J.M. Bell, W. Wlodarski, N. Motta, Sens. Actuators B 173, 789–796 (2012)CrossRefGoogle Scholar
  8. 8.
    T. Akamatsu, T. Itoh, N. Izu, W. Shin, Sensors 13, 12467–12481 (2013)CrossRefGoogle Scholar
  9. 9.
    N.M. Vuong, D. Kim, H. Kim, Sci. Rep. 5, 11040 (2015)Google Scholar
  10. 10.
    M. Filipescu, S. Orlando, V. Russo, A. Lamperti, A. Purice, A. Moldovan, M. Dinescu, Appl. Surf. Sci. 253, 8258–8262 (2007)ADSCrossRefGoogle Scholar
  11. 11.
    H. Kawasaki, J. Namba, K. Iwatsuji, Y. Suda, K. Wada, K. Ebihara, T. Ohshima, Appl. Surf. Sci. 197–198, 547–551 (2002)CrossRefGoogle Scholar
  12. 12.
    H. Kawasaki, T. Ueda, Y. Suda, T. Ohshima, Sens. Actuators B 100, 266–269 (2004)CrossRefGoogle Scholar
  13. 13.
    J. Lappalainen, R. Viter, J. Puustinen, D. Gornostayev, V. Smyntyna, Proc. Eng. 5, 343–346 (2010)Google Scholar
  14. 14.
    C. Ristoscu, L. Cultera, A. Dima, A. Perrone, R. Cutting, H.L. Du, A. Busiakiewicz, Z. Klusek, P.K. Datta, S.R. Rose, Appl. Surf. Sci. 247, 95–100 (2005)ADSCrossRefGoogle Scholar
  15. 15.
    R. Dolbec, M.A. El Khakani, A.M. Serventi, M. Trudeau, R.G. Saint-Jacques, Thin Solid Films 419, 230–236 (2002)ADSCrossRefGoogle Scholar
  16. 16.
    M.A. El Khakani, R. Dolbec, A.M. Serventi, M.C. Horrillo, M. Trudeau, R.G. Saint-Jacques, D.G. Rickerby, I. Sayago, Sens. Actuators B 77, 383–388 (2001)CrossRefGoogle Scholar
  17. 17.
    M. Filipescu, P.M. Ossi, M. Dinescu, Appl. Surf. Sci. 254, 1347–1351 (2007)ADSCrossRefGoogle Scholar
  18. 18.
    S.-H. Lee, H.M. Cheong, P. Liu, D. Smith, C.E. Tracy, A. Mascarenhas, J.R. Pitts, S.K. Deb, Electrochim. Acta 46, 1995–1999 (2001)CrossRefGoogle Scholar
  19. 19.
    N.E. Stankova, P.A. Atanasov, T.J. Stanimirova, A. Og Dikovska, R.W. Eason, Appl. Surf. Sci. 247, 401–405 (2005)ADSCrossRefGoogle Scholar
  20. 20.
    M. Akiyama, J. Tamaki, N. Miura, N. Yamazoe, Chem. Lett. 20, 1611–1614 (1991)CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Ville Kekkonen
    • 1
  • Saumyadip Chaudhuri
    • 1
  • Fergus Clarke
    • 1
  • Juho Kaisto
    • 1
  • Jari Liimatainen
    • 1
  • Santhosh Kumar Pandian
    • 1
  • Jarkko Piirto
    • 1
  • Mikael Siltanen
    • 1
  • Aleksey Zolotukhin
    • 1
  1. 1.Picodeon Ltd OyIiFinland

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